等间距螺旋电极压电驱动器制备与静态性能测试  

Preparation and Static Performance Testing of Piezoelectric Actuators with Equally Spaced Spiral Electrodes

作　　者：张树良 刘永刚[1,2] 李海吉 王亚腾 ZHANG Shuliang;LIU Yonggang;LI Haiji;WANG Yateng(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471003,China;Henan Collaborative Innovation Center of Advanced Equipment Manufacturing of Henan Province,Henan University of Science and Technology,Luoyang 471003,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003 [2]河南科技大学机械装备先进制造河南省协同创新中心,河南洛阳471003

出　　处：《压电与声光》2023年第2期313-319,共7页Piezoelectrics & Acoustooptics

基　　金：河南省重点攻关基金资助项目(212102210065);河南省产学研合作基金资助项目(182107000012)。

摘　　要：基于阿基米德螺线方程提出一种等间距螺旋电极压电驱动器,该文分析了其电极结构与驱动原理,采用丝网印刷法对该驱动器螺旋电极进行了印制,并完成待测元件的制备。搭建了位移测试平台测试元件的静态性能,并对其静态的径向位移及平面扭转角进行了研究。试验结果表明,直径25 mm、厚2 mm、电极宽0.6 mm、电极中心距1.2 mm的等间距螺旋电极压电驱动器在频率0.5 Hz、电压200 V的正弦激励信号作用下,径向峰值位移可达1.02μm,为传统电极压电元件的1.57倍,扭转角度可达0.12 mrad,与传统型压电驱动器相比,该元件具有较大的径向位移输出,且产生的扭转角度明显。Based on the Archimedes spiral equation,a piezoelectric actuator with equally spaced spiral electrodes is proposed in this paper.The electrode structure and driving principle of the actuator are analyzed.The spiral electrodes are fabricated by screen printing method,and the components to be tested are prepared.A displacement test platform was built to test the static performance of the element,and its static radial displacement and plane torsion angle were investigated.The experimental results show that under the action of sinusoidal excitation signal with frequency of 0.5 Hz and voltage of 200 V,the radial peak displacement of spiral electrode piezoelectric actuator with diameter of 25 mm,thickness of 2 mm,electrode width of 0.6 mm and electrode center distance of 1.2 mm can reach 1.02μm,which is 1.57 times of that of traditional electrode piezoelectric actuator.The torsion angle can reach 0.12 mrad.Compared with the traditional piezoelectric actuator,the device has larger radial displacement output and produces obvious torsion angle.

关 键 词：等间距 螺旋电极 压电驱动器 制备 扭转角 

分 类 号：TN384[电子电信—物理电子学]