微机电硅谐振器动态建模及同步控制  

Dynamics Modeling and Synchronization Control of Clamped-Clamped Beam MEM Silicon Resonator

作　　者：常淑俊[1] 孙佳伟 CHANG Shujun;SUN Jiawei(University of Electronic Science and Technology of China Zhongshan Institute,Zhongshan Guangdong 528400;School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731)

机构地区：[1]电子科技大学中山学院,广东中山528400 [2]电子科技大学自动化工程学院,成都611731

出　　处：《电子科技大学学报》2023年第3期475-480,共6页Journal of University of Electronic Science and Technology of China

基　　金：四川省科技计划资助项目(2020YFH0027)。

摘　　要：由于微机电(MEM)硅谐振器高能量输出下的周期性振荡、分岔、混沌等非线性因素,使其振荡频率控制精度有限。针对双端固支梁微机电硅谐振器,提出了一种输出反馈同步控制方法,通过振荡器同步以提高其振荡频率控制性能。首先,对双端固支梁MEM硅谐振器系统结构及非线特性进行了分析,并建立了充分考虑系统非线性特性的动态模型;在此基础上,设计了基于同步误差的输出反馈同步控制器,实现了多MEM硅谐振器同步控制,并使得相应的同步误差渐近收敛到零。最后,通过仿真实验证明了所提出方法的有效性。Non-linear factors such as periodic oscillation,bifurcation and chaos under the high-energy output of micro-electro-mechanical(MEM)silicon resonators will limit the accuracy of oscillation frequency control.This paper proposes an output feedback synchronous control method for clamped-clamped beam micro-electromechanical silicon resonators and improves its oscillation frequency control performance through oscillator synchronization.First,the system structure and nonlinear characteristics of the MEM silicon resonator with clamped-clamped beam MEM silicon resonators are analyzed and a dynamic model that fully considers the nonlinear characteristics of the system is established.On this basis,an output feedback synchronization controller based on synchronization error is designed,it can realize the synchronous control of multi-MEM silicon resonators and make the corresponding synchronous error asymptotically converge to zero.Finally,the effectiveness of the proposed method is proved by simulation experiments.

关 键 词：动态模型 微机电 同步控制 双端固支梁MEM硅谐振器 

分 类 号：TP271[自动化与计算机技术—检测技术与自动化装置]