鞘气辅助空气动力学透镜的干法气溶胶喷印装置设计  

Design of Dry Aerosol Jet Printing Device with Sheath Gas-Assisted Aerodynamic Lens

作　　者：舒霞云 王策[1,2,3] 常雪峰 周智[1,2,3] Shu Xiayun;Wang Ce;Chang Xuefeng;Zhou Zhi(School of Mechanical&Automation Engineering,Xiamen University of Technology,Xiamen 361024,China;Key Laboratory of Precision Drive and Transmission of Colleges and Universities of Fujian Province,Xiamen University of Technology,Xiamen 361024,China;Xiamen Key Laboratory of Intelligent Manufacturing Equipment,Xiamen 361024,China;College of Marine Equipment and Mechanical Engineering,Jimei University,Xiamen 361021,China)

机构地区：[1]厦门理工学院机械与汽车工程学院,福建厦门361024 [2]厦门理工学院精密驱动与传动福建省高等学校重点实验室,福建厦门361024 [3]厦门市智能制造高端装备研究重点实验室,福建厦门361024 [4]集美大学海洋装备与机械工程学院,福建厦门361021

出　　处：《微纳电子技术》2023年第4期615-625,共11页Micronanoelectronic Technology

基　　金：国家自然科学基金面上项目(51975501);福建省自然科学基金项目(2022J011243)。

摘　　要：针对湿法气溶胶技术在喷印过程中由于需要提高喷印线条精度和使用有机溶剂而带来的诸多问题,设计了一种鞘气辅助空气动力学透镜的干法气溶胶喷印装置,实现金属纳米颗粒材料的聚焦和沉积。该装置以鞘气辅助空气动力学透镜作为聚焦模块、以纳米银粉作为材料,避免了因使用有机溶剂带来的问题。在使用透镜公式计算的基础上,通过透镜计算器综合得出透镜结构尺寸,选择合适方式引入鞘气辅助聚焦,通过SolidWorks建模软件对装置进行建模,并采用Ansys Fluent仿真软件对空气动力学透镜进行仿真分析。仿真结果表明:颗粒粒径对透镜聚焦效果有较大影响;辅助鞘气倾角为40°时装置有更好的聚焦效果。在已构建的气溶胶喷印平台上对所设计装置进行实验研究,探究喷印线条形貌变化。在实验研究中获得了最小线宽为86.09μm的喷印线条,相当于喷嘴直径的43%。同时实验结果表明载气体积流量、基底温度、鞘气体积流量对喷印线条宽度有较大影响,对线条高度影响较小,喷印层数对线条宽度、高度都有较大影响。To resolve the issues of wet aerosol technology in the printing process due to the need to improve the accuracy of the printing line and the use of organic solvents,a dry aerosol jet printing device with sheath gas-assisted aerodynamic lens was designed to achieve the focusing and deposition of metal nanoparticle materials.With sheath gas-assisted aerodynamic lens as the focusing module and nano-silver powder as the material,the device can avoid the issues caused by organic solvents.Based on the calculation with the lens formula,the lens structure dimensions were synthesized by the lens calculator,a suitable way was selected to introduce the sheath gas assisted focusing.The device was modeled by SolidWorks modeling software,and the aerodynamic lens was simulated and analyzed by Ansys Fluent simulation software.The simulation results show that the particle size has a large impact on the lens focusing effect,the device has a better focusing effect with a auxiliary sheath gas inclination angle of 40°.The experimental study of the designed device was carried out on the constructed aerosol printing platform to investigate the variation of the printing line morphology.In the experimental study,the printed line with a minimum line width of 86.09μm is obtained,which corresponds to 43%of the nozzle diameter.Meanwhile,the experimental results show that the carrier gas volume flow,substrate temperature and sheath gas volume flow have great effect on the printing line width and little effect on the printing line height,the number of printing layers has great effect on the width and height of the printing line.

关 键 词：气溶胶喷印技术 鞘气辅助空气动力学透镜 金属纳米颗粒 辅助鞘气倾角 喷印线条形貌 

分 类 号：TS851[轻工技术与工程]