光学自由曲面测量与误差评估技术研究进展  

Advances in Measurement and Error Evaluation Technique of Optical Freeform Surfaces

作　　者：王施相 孔令豹 吕昊宇 Wang Shixiang;Kong Lingbao;LüHaoyu(Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing,School of Information Science and Technology,Fudan University,Shanghai 200438,China)

机构地区：[1]复旦大学上海超精密光学制造工程技术研究中心,信息科学与工程学院,上海200438

出　　处：《光学学报》2023年第8期235-254,共20页Acta Optica Sinica

基　　金：国家自然科学基金(52205559,52075100)。

摘　　要：光学自由曲面是现代精密光学领域的重大变革,因其优异的光学、力学性能而有望进一步推进光学系统实现微型化、轻量化、集成化。随着光学自由曲面的面形复杂度不断提升,光学自由曲面的检测技术已成为制约其制造水平的关键因素。回顾了近年来光学自由曲面测量与误差评估的关键技术,包括点线式扫描、全口径光学测量方法以及面形误差评估方法,结合各种技术的优缺点,展望了该领域未来发展的新趋势,并介绍了一种结合多传感器实现共体自由曲面的测量及误差评估的新方法。Significance Freeform surfaces have been regarded as one of the major revolutions in the field of modern precision optics.They are expected to further promote miniaturization,lightweight and integration of optical systems due to their excellent optical and mechanical properties.The quality of machined freeform surfaces will significantly influence the performance of optical systems.Surface metrology including the measurement of surface texture and surface form errors is the important post-manufacturing part to determine which surface can be employed.In the past decades,various methods have been developed for measuring and characterizing freeform surfaces,mainly including probe-based scanning,fullaperture optical inspection,on-machine measurement technology,feature-based surface registration and multi-scale data fusion methods.Although many corresponding advances have been achieved,great challenges are posed to the quality of surface manufacturing with the complexity of freeform surfaces increasing.Moreover,the surface form error is required to be lower than 0.1μm and the surface roughness should be less than 1 nm.It is urgent to develop a new measurement technology for achieving a higher dynamic range and a higher accuracy.Hence,it is important and necessary to summarize the existing research to guide the future development of this field more rationally.Progress Measurement and characterization of optical freeform surfaces are the key processes to check the quality of freeform surfaces.The widely used techniques related to these two processes are summarized.Firstly,the precision measurement methods for optical freeform surfaces are introduced,including probe-based scanning,full-aperture optical inspection and on-machine measurement.The probe-based scanning methods include nanoscale 3D coordinate measuring machine,non-contact profile scanner and swing arm profilometer.To further improve the dynamic and precision measurement performance of coordinate measuring machines,Manske's research group from Technische Unive

关 键 词：光学设计 光学自由曲面 精密测量 面形测量 误差评估 误差参数 

分 类 号：O436[机械工程—光学工程]