基于傅里叶变换光学系统的动态多光束干涉光刻  

Dynamic Multi-Interference Lithography Incorporating Modulated Optical Fourier Transform System

作　　者：叶燕 马亚骐[1,2] 宋志 路畅 许宜申 陈林森[1,2] Ye Yan;Ma Yaqi;Song Zhi;Lu Chang;Xu Yishen;Chen Linsen(School of Optoelectronic Science and Engineering,Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,Suzhou 215006,Jiangsu,China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province,Key Lab of Modern Optical Technologies of Education Ministry of China,Soochow University,Suzhou 215006,Jiangsu,China)

机构地区：[1]苏州大学光电科学与工程学院,苏州纳米科技协同创新中心,江苏苏州215006 [2]苏州大学江苏省先进光学制造技术重点实验室,教育部现代光学技术重点实验室,江苏苏州215006

出　　处：《光学学报》2023年第8期265-277,共13页Acta Optica Sinica

基　　金：国家自然科学基金(62075149,61575132);江苏省自然科学基金(BK20201406);江苏省高校优势学科建设(PAPD)。

摘　　要：变参量微纳结构在二维平面内交叉、分段排布可以实现超表面器件的多路复用和多功能集成。为实现交叉、分段变参量微纳结构的干涉制备,提出了孔径光阑与相位元件联合调制的傅里叶变换光学系统。利用透镜的傅里叶变换特性和相位元件衍射光线的几何传播特性,阐明了傅里叶成像面上交叉、分段分布的多干涉光场的生成方法与调控规律。同时,针对目标分布的变参量微纳结构,反演设计了多像素孔径光阑与基于光栅和变参量光栅的相位元件,实验获得了交叉、分段分布的多干涉光场。将多干涉光场与微缩投影结合可制备分段排布的纳米光栅。将动态调控的多干涉光场分时复用可制备分段排布的变参量纳米光栅。Objective While space-variant micro/nano structures are segmented or interleaved in a two-dimensional plane,they demonstrate integrated performance as a multi-function or multiplexing meta-device.Among present technologies,projection lithography and interference lithography are effective for the rapid fabrication of micro/nano structures.By highresolution masks,projection lithography produces space-variant micro/nano structures quickly.However,the area of its fabricated micro/nano structures is seriously limited by variation ranges of parameters.For interference lithography,the structural profile and period can be varied by changing intensities and interference angles of light beams,respectively.Nevertheless,their corresponding micro/nano structures change in a limited range with low resolution,in addition to their complex optical setups.Combining projection lithography with interference lithography,this paper reports an optical Fourier transform system modulated by phase element to dynamically produce micro/nano structures in a wide variation range and achieves structural period variation of less than 1 nm.It merely produces structures pixel by pixel and dimension of every pixel is constant.Then,space-variant phase element is utilized as the phase element,where multi-interference light fields are generated to fabricate different micro/nano structures in different shaped pixels.However,their structural parameters and pixels cannot be customized or changed in real time.Therefore,this paper proposes a method to parallel produce micro/nano structures with independent changed structural parameters and pixels,which can be utilized to generate flexible arranged space-variant micro/nano structures for multi-function or multiplexing meta-devices.Methods An optical Fourier transform system jointly modulated by aperture diaphragms and a phase element is proposed.With the Fourier transform principle of lenses and the geometric propagation characteristics of diffraction beams in the phase element,the generation and manipulat

关 键 词：光学设计 相位调制 4f光学系统 空间变参量 干涉光刻 

分 类 号：O438.2[机械工程—光学工程] TH691.9[理学—光学]