基于355nm紫外激光切割柔性覆铜板的工艺参数优化  

Optimization of Process Parameters Based on 355 nm UV Laser Cutting of Flexible Copper Clad Laminates

作　　者：刘文鑫 陈志城 李岩 陈广玉 黄柳青 罗学涛[1] Liu Wenxin;Chen Zhicheng;Li Yan;Chen Guangyu;Huang Liuqing;Luo Xuetao(College of Material,Xiamen Key Laboratory of Electronic Ceramic Materials and Devices,Xiamen University,Xiamen 361005,Fujian,China;Xiamen Apson Electronic Technology Co.,Ltd.,Xiamen 361101,Fujian,China)

机构地区：[1]厦门大学材料学院,厦门市电子陶瓷材料与元器件重点实验室,福建厦门361005 [2]厦门爱谱生电子科技有限公司,福建厦门361101

出　　处：《中国激光》2023年第8期21-30,共10页Chinese Journal of Lasers

基　　金：厦门市重大科技项目(3502Z20201002)。

摘　　要：针对紫外激光切割柔性覆铜板时出现焦黑碳化、过熔及过多能量损耗等问题,采用355 nm紫外纳秒激光切割机对49μm厚聚酰亚胺双面无胶柔性覆铜板进行激光切割实验,通过预切割遍历参数以验证切割覆铜板的最小能量——临界切割能量。在此基础上,研究了切割参数对柔性覆铜板表面形貌、截面形貌、碳化程度、刻缝宽度以及表面和截面成分变化的影响。实验结果表明:激光切割速度、切割功率和重复切割次数对柔性覆铜板的切割质量具有重要影响,提升切割速度、保持适中的切割功率、降低重复切割次数能够获得切口光滑且无积碳的高质量、低功耗切割效果。由以上结果可得出本实验条件下的最佳工艺参数:切割速度为2000 mm/s,切割功率为12 W,重复切割次数为70次。本实验研究结果为实现柔性覆铜板的高质量、低能耗激光切割提供了工艺依据,而且该切割工艺可适用于柔性电路板、聚酰亚胺覆盖膜及补强板等通过激光切割成形的材料。Objective Cutting flexible copper clad laminates(FCCLs)using UV lasers is an excellent process;however,it has certain drawbacks.Multiple laser cuts are often required for double-and multi-layer FCCLs,resulting in lower productivity.In addition,laser cutting leaves debris on the product surface,which requires secondary cleaning,thereby increasing costs.Most importantly,the high temperature and high laser energy density can easily exceed the thermal damage threshold of the product,resulting in carbonization.Carbide can cause short circuits,which are the most severe defects in electronics.Moreover,process defects such as excessive heataffected zones of FCCL caused by improper parameter selection,over-melting of the material,or cutting energy not reaching the cutting threshold result in product failure and increased power loss,which in turn increases process costs.Therefore,we designed a laser cutting process that can effectively reduce the photo-thermal effect on the surface and cutting edge of the FCCL,and cut the FCCL using minimum energy to reduce the generation of carbide.It is expected that this method can be applied to various thin-film materials that require laser processing.Methods The 49μm polyimide double-sided adhesive-free flexible copper clad laminate was cut using a 355 nm UV nanosecond laser cutter as follows.First,the minimum energy for cutting the FCCL,the critical cutting energy,was determined by varying the laser scanning speed,laser scanning power,and the number of repetitive scans through pre-cutting experiments.Second,three laser cutting parameters were traversed to verify and correct the critical cutting energy value.Finally,the critical cutting energy value was used to examine the effect of the aforementioned laser cutting parameters on the surface profile,cross-sectional profile,degree of carbonization,width of the etched slit,and changes in the surface and cross-sectional composition of the FCCL,while ensuring the cutting through the FCCL.This allows the process parameters to be further ad

关 键 词：激光技术 紫外激光切割 柔性覆铜板(FCCL) 临界切割能量 工艺参数 

分 类 号：TN209[电子电信—物理电子学]