大口径半环形高次非球面检测与轻量化分析  

Detection and Lightweight Analysis of Large-Diameter Semi-Annular High-Order Aspheric Surface

作　　者：崔金龙 胡明勇[2] 毕亚超 封志伟 白茜 陈光宇 徐剑锋 Cui Jinlong;Hu Mingyong;Bi Yachao;Feng Zhiwei;Bai Qian;Chen Guangyu;Xu Jianfeng(School of Instrument Science and Opto-Electronic Engineering,Hefei University of Technology,Hefei 230009,Anhui,China;Academy of Opto-Electric Technology,Hefei University of Technology,Hefei 230009,Anhui,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009 [2]合肥工业大学光电技术研究院,安徽合肥230009

出　　处：《激光与光电子学进展》2023年第7期273-280,共8页Laser & Optoelectronics Progress

摘　　要：为了实现对大口径高次非球面镜的面形精度检测,本文针对一个内径572 mm、外径800 mm的半环形凹高次非球面反射镜,进行补偿检测系统设计和轻量化分析。基于三级像差理论,采用双透镜与单反射面的结构对非球面反射镜进行补偿检测,得到均方根(RMS)值为0.0037λ(λ=632.8 nm)的补偿检测系统。采用三角形孔对高次非球面镜进行轻量化,轻量化后镜体质量小于30 kg,轻量化率为32.7%。结合机械支撑结构,对高次非球面镜与支撑结构在自身重力作用下进行有限元分析。当光轴与重力方向平行时,RMS值为0.012λ。当光轴与重力方向垂直时,RMS值为0.013λ,镜体所受最大应力为1.308×10^(5)Pa,机械支撑结构所受最大应力为1.381×10^(5)Pa,非球面镜和支撑结构所受应力都小于各自材料的极限应力。This study aims to accurately detect the surface shape of large-aperture high-order aspheric mirrors.A compensation detection system is designed,and lightweight analysis of a semi-annular concave high-order aspheric mirror with inner and outer diameters of 572 mm and 800 mm,respectively,is performed.Based on the theory of three-order aberration,the aspheric mirror is compensated for and detected using the double-lens structure and single-reflecting surface,and a compensation detection system with a root-mean-square(RMS)value of 0.0037λ(λ=632.8 nm)is developed.Triangular holes are used to lighten the high-order aspheric mirror.After achieving light weight,the weight of the lens body becomes less than 30 kg,and the weight reduction rate is 32.7%.A finite element analysis of the high-order aspheric mirror and the support structure under its gravity,combined with the mechanical support structure,is conducted.The RMS values obtained when the optical axis is parallel and perpendicular to the direction of gravity are 0.012λand 0.013λ,respectively.The maximum stresses on the mirror body and mechanical support structure are 1.308×10^(5) Pa and 1.381×10^(5) Pa,respectively.The stresses on the aspheric mirror and support structure are lower than the ultimate stress of the respective material.

关 键 词：光学设计 高次非球面 轻量化 三级像差 补偿检测 有限元 

分 类 号：O435[机械工程—光学工程]