放电电压形式对空心阴极甲烷放电等离子体组分及离子能量的影响研究  

Influence of Discharge Voltage Form on Composition and Ion Energy of Methane Discharge Plasma in Hollow Cathode

作　　者：连张翔 安政杰 罗煌锦 李烨 赵军平[1] 张乔根[1] LIAN Zhangxiang;AN Zhengjie;LUO Huangjin;LI Ye;ZHAO Junping;ZHANG Qiaogen(School of Electrical Engineering,Xi’an Jiaotong University,Xi’an 710049,China)

机构地区：[1]西安交通大学电气工程学院,西安710049

出　　处：《西安交通大学学报》2023年第5期171-181,共11页Journal of Xi'an Jiaotong University

基　　金：国家电网有限公司科技资助项目(52094020006W)。

摘　　要：为了优化空心阴极结构中有机气体放电制备类金刚石薄膜的放电电压形式,掌握放电等离子体组分及能量特性,采用直流和重复频率脉冲两种外施电压形式,运用发射光谱诊断法结合数值仿真研究了不同放电电压形式下空心阴极甲烷放电等离子体组分特性。研究结果显示,放电平均电流接近时,直流电压作用下的甲烷分子解离程度比重复频率脉冲电压作用下更高。升高直流电压或脉冲电压幅值,增加脉冲宽度,提高脉冲频率,均可促进甲烷分子解离。不同放电电压形式下甲烷放电等离子体中的单碳离子比例差异较大,重复频率脉冲电压作用下,放电等离子体未充分发展,且电子能量更高,利于单碳离子的生成,使单碳离子比例更高。同时,利用减速电场法获得了不同放电电压形式下到达基底的离子能量分布情况,发现重复频率脉冲电压作用下的离子能量更高,并呈双峰分布,直流电压作用下离子能量呈单峰分布。离子能量与外施直流电压或脉冲电压幅值呈正相关性。This paper is compiled with a view to optimize the discharge voltage form of diamond-like carbon film prepared by organic gas discharge in a hollow cathode structure,and to understand the discharge plasma composition and energy characteristics.This paper examines the characteristics of hollow cathode methane discharge plasma under different discharge voltage forms(DC voltage and repetition frequency pulse voltage)through emission spectroscopy diagnosis and numerical simulation.The results show that when the average discharge current is close,the dissociation degree of methane molecules under DC voltage is higher than that under repetition frequency pulse voltage.The dissociation of methane molecules can be promoted by increasing the DC voltage or pulse voltage amplitude,the pulse width and the pulse frequency.The proportion of single carbon ions in methane discharge plasma varies greatly under different discharge voltage forms.The discharge plasma is not fully developed and its electron energy is higher under repetition frequency pulse voltage,which is conducive to the generation of single carbon ions and makes the proportion of single carbon ions higher.The energy distribution of ions reaching the substrate under different discharge voltage forms is obtained by the deceleration electric field method.It is found that the ion energy under repetition frequency pulse voltage is higher and shows a bimodal distribution while the ion energy under DC voltage presents a unimodal distribution.The ion energy is positively correlated with the applied DC voltage or pulse voltage amplitude.

关 键 词：类金刚石薄膜 放电电压形式 甲烷分子解离程度 单碳离子比例 离子能量分布 

分 类 号：TN305.8[电子电信—物理电子学]