基于递推阻尼最小二乘辨识的六自由度磁悬浮平面电机动力学模型  

Dynamic Model of 6-DOF Magnetic Levitation Planar Motor Based on Recursive Damped Least Squares Identification

作　　者：任晓威 曹广忠[1] 黄苏丹[1] 胡智勇 REN Xiaowei;CAO Guangzhong;HUANG Sudan;HU Zhiyong(Guangdong Key Laboratory of Electromagnetic Control and Intelligent Robot,College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen Guangdong 518060,China)

机构地区：[1]深圳大学机电与控制工程学院,广东省电磁控制与智能机器人重点实验室,广东深圳518060

出　　处：《微电机》2023年第4期24-28,共5页Micromotors

基　　金：国家自然科学基金(52277061、51907128);广东省自然科学基金(2021A1515011704);深圳市自然科学基金基础研究重点项目(JCYJ20220818095804009)。

摘　　要：六自由度磁悬浮平面电机是一种新型特种电机,具有六自由度运动、直接驱动、无机械摩擦、结构紧凑等特点,在光刻机等精密制造领域极具应用前景。然而,由于该类电机具有多变量、非线性、强耦合等突出特性,难以精确获取其动力学模型。为此,论文提出基于递推阻尼最小二乘辨识的六自由度磁悬浮平面电机动力学模型。首先,推导了六自由度磁悬浮平面电机的动力学模型。其次,基于多新息最小二乘法创新的引入阻尼项建立了递推阻尼最小二乘法,之后,利用Matlab对所提出方法进行仿真,获得电机在X、Y自由度上的辨识模型。最后,通过仿真验证了所建立动力学模型的准确性,实际系统与辨识模型之间的X、Y自由度上的均方误差分别为22.42 nm、7.11 nm。Six-degrees-of-freedom(6-DOF)magnetic levitation planar motor is a new type of special motor,which has the characteristics of six degrees of freedom movement,direct drive,no mechanical friction,compact structure and so on.It has great application prospects in the precision manufacturing field such as lithography machine.However,it is difficult to accurately obtain the dynamic model of the motor due to its prominent characteristics such as multivariable,nonlinear and strong coupling.In this paper,a dynamic model of six degrees of freedom maglev planar motor based on recursive damping least squares identification was proposed.Firstly,the dynamic model of six degrees of freedom magnetic levitation planar motor was derived.Secondly,the recursive damping least squares method was established based on the introduced damping term of the innovation of the multi-new least squares method.After that,the proposed method was simulated by Matlab,and the identification model of the motor in X and Y degrees of freedom was obtained.Finally,the accuracy of the established dynamic model was verified by simulation.The mean square error of X and Y degrees of freedom between the actual system and the identified model is 22.42 nm and 7.11 nm,respectively.

关 键 词：六自由度磁悬浮平面电机 动力学模型 递推阻尼最小二乘辨识 

分 类 号：TM351[电气工程—电机]