可调谐探针起振系统设计  

Design of vibration starting system of tunable probe

作　　者：温阳 陈纵横 冯婕 舒鹏丽 马宗敏[1,2] Wen Yang;Chen Zongheng;Feng Jie;Shu Pengli;Ma Zongmin(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051 [2]中北大学仪器与电子学院,太原030051

出　　处：《国外电子测量技术》2023年第4期80-85,共6页Foreign Electronic Measurement Technology

基　　金：国家自然科学基金(61874100);山西“1331工程”重点学科建设(1331KSC)项目资助。

摘　　要：为了兼顾非接触式原子力显微镜(noncontact atomic force microscope,NC-AFM)更高谐振频率探针的使用需求,并通过提高控制器精度进而提高NC-AFM分辨率,提出了一种基于探针-样品间原子作用力变化的全数字可调谐NC-AFM高分辨率探针起振系统。在Simulink环境下对探针起振系统的控制部分进行了设计,通过现场可编程门阵列(FPGA)实现了鉴相,滤波,锁频等功能;采用压电陶瓷片驱动探针振动,设计了操作便捷的探针座。将不同频率正弦信号提供给设计的起振系统进行功能性验证,实验结果表明,系统可以在20 kHz~50 MHz频率范围内跟踪探针谐振频率;最后使用起振系统成功使商用探针在谐振频率处振动,准确测出了探针的谐振频率及振动幅值,系统频率分辨率达到了0.1 Hz。In order to meet the needs of higher resonant frequency probes for noncontact atomic force microscope(NCAFM)and improve the accuracy of the controller to improve the resolution of NC-AFM,a high-resolution probe oscillation system based on the change of atomic force between probe and sample is proposed.The control part is designed in the Simulink environment,mainly through FPGA to realize the functions of phase discrimination,filtering and frequency locking;the driving part is driven by piezoelectric ceramics,and the probe base with convenient operation is designed.Sinusoidal signals of different frequencies are provided to the designed oscillation system for functional verification.The experimental results show that the probe resonance frequency can be tracked by the system within the frequency range of 20 kHz~50 MHz.Finally,the commercial probe is successfully vibrated at the resonant frequency using the vibration initiation system,and the resonant frequency and vibration amplitude of the probe are accurately measured.The system frequency resolution reaches 0.1 Hz.

关 键 词：非接触式原子力显微镜(NC-AFM) 起振 谐振频率 数字锁相环 压电陶瓷 

分 类 号：TH742[机械工程—光学工程]