液相外延法制备的掺杂石榴石单晶薄膜  

Doped garnet single crystal films prepared by liquid phase epitaxy

作　　者：李阳 李俊 陈运茂 魏占涛 刘庆元 帅世荣 蓝江河[1] LI Yang;LI Jun;CHEN Yun-mao;WEI Zhan-tao;LIU Qing-yuan;SHUAI Shi-rong;LAN Jiang-he(Ninth Institute,China Electronics Technology Group,Mianyang 621000,China)

机构地区：[1]中国电子科技集团公司第九研究所,四川绵阳621000

出　　处：《磁性材料及器件》2023年第3期17-21,共5页Journal of Magnetic Materials and Devices

摘　　要：以高纯氧化物为原材料,采用液相外延法(LPE)制备直径3英寸、厚度20μm以上的掺杂钇铁石榴石(YIG)单晶薄膜,通过离子掺杂对薄膜的饱和磁化强度进行调控,范围为800~1750 G。X射线衍射分析表明薄膜仅有单一衍射峰,且半高宽值约为0.007°。磁性能测试结果表明,制备的薄膜饱和磁化强度可宽幅调控,且呈现明显的平面磁各向异性。同时对薄膜的截面及表面形貌进行观测,发现薄膜与衬底间界面清晰,薄膜表面粗糙度小于1nm,离子掺杂均匀,为后续的器件应用打下良好的基础。Using high purity oxide as raw material,a 3-inch doped yttrium iron garnet single crystal film with a thickness of more than 20μm was prepared by liquid phase epitaxy,and the saturation magnetization of the film was regulated by ion doping,ranging from 800 to 1750 G.The X-ray diffraction results show that the film has only a single diffraction peak,and the value of the full width at half maximum is about 0.007°.The magnetic property test results show that the prepared film covers a wide range of saturation magnetization and exhibits obvious planar magnetic anisotropy.The cross section and surface of film was observed,and it was found that the interface between the film and substrate was clear,the surface roughness was less than 1 nm,and the ion doping uniformity was well,which lays a good foundation for subsequent device applications.

关 键 词：石榴石单晶薄膜 液相外延 离子掺杂 饱和磁化强度 

分 类 号：TM277[一般工业技术—材料科学与工程]