大规模红外焦平面阵列探测器的有效像元率研究  

Research on Effective Pixel Rate of Large-Scale Infrared Focal Plane Array Detectors

作　　者：谢珩[1] 周铭[1] 李春领[1] 刘江高 XIE Heng;ZHOU Ming;LI Chun-ling;LIU Jiang-gao(North China Research Institute of Electro-Optics,Beijing 100015,China)

机构地区：[1]华北光电技术研究所,北京100015

出　　处：《红外》2023年第6期1-6,共6页Infrared

摘　　要：随着大规模红外焦平面阵列探测器应用的日益广泛,用户对其有效像元率指标提出了越来越高的要求。分析了有效像元率提升的难点。通过优化基于垂直布里奇曼法的衬底生长以及表面加工等工艺,提高了液相外延材料质量,获得了低缺陷中波碲镉汞薄膜外延材料;通过开发碲镉汞探测器背面平坦化工艺和优化探测器与读出电路倒装互连工艺,提高了成品率。最终提升了有效像元率指标(大于99.8%),获得了良好的效果。With the increasing application of large-scale infrared focal plane array detectors,users have put forward higher and higher requirements for the effective pixel rate index.The difficulty of improving the effective pixel rate is analyzed.By optimizing the processes such as substrate growth based on the vertical Bridgman method,and surface processing,the quality of liquid-phase epitaxy materials has been improved,and low-defect medium-wave HgCdTe thin-film epitaxy materials have been obtained.Through the development of back-side flattening process of HgCdTe detectors and optimization of flip-chip interconnection process for detector and readout circuit,the finished product rate is improved.Finally,the effective pixel rate index(greater than 99.8%)is improved,and good results are obtained.

关 键 词：有效像元率 红外焦平面阵列 液相外延 倒装互连 

分 类 号：TN214[电子电信—物理电子学]