不同结构石墨烯发声器的声学性能  

Acoustic Properties of Graphene Microphones with Different Structures

作　　者：张学泽 张晴宇 朱峰 唐昭 李双 Zhang Xueze;Zhang Qingyu;Zhu Feng;Tang Zhao;Li Shuang(School of Rail Transportation,Soochow University,Suzhou 215131,China)

机构地区：[1]苏州大学轨道交通学院,江苏苏州215131

出　　处：《微纳电子技术》2023年第5期682-689,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金面上项目(51875374)。

摘　　要：基于热声效应,对不同结构石墨烯发声器的声学性能进行研究。利用石墨烯发声器的热功率平衡方程推导出三维石墨烯泡沫发声器的近远场声压表达式,将理论计算结果与实验测试值对比,两者吻合良好,验证了理论模型的正确性;并将石墨烯泡沫与二维石墨烯薄膜进行对比,比较了四种不同结构石墨烯发声器的发声效果。结果表明,石墨烯泡沫发声效果最好,其次是铜基底石墨烯薄膜,聚对苯二甲酸乙二醇酯(PET)基底和玻璃基底的石墨烯薄膜发声效果较差;在20~10 000 Hz内,施加10 V电压、测距为1 cm的条件下,石墨烯泡沫、铜基底石墨烯薄膜、PET基底石墨烯薄膜和玻璃基底石墨烯薄膜的最大单频声压级分别为59.9、53.5、47.8和38.9 dB。铜基底石墨烯薄膜和石墨烯泡沫有一倍频声压产生。针对一倍频声压现象,测试铜基底石墨烯薄膜和石墨烯泡沫的振动加速度。结果表明,一倍频声压的产生与石墨烯发声器的振动有关,一倍频声压随着输入电压幅度和频率的升高而增大。该研究结果对石墨烯发声器的设计和应用具有参考价值。Based on thermoacoustic effect,the acoustic properties of graphene microphones with different structures were investigated.Based on the thermal power balance equation of the graphene microphone,the near-and far-field sound pressure expression of the three-dimensional graphene foam microphone was derived.The theoretical calculation results were compared with the experimental test values,showing that the two match well and verifying the correctness of the theoretical model.Graphene foam was compared with two-dimensional graphene film,and the acoustic effects of four different structures of graphene microphones were compared.The results show that the graphene foam has the best sound generation effect,followed by the copper-based graphene film,while the polyethylene terephthalate(PET)-based and glass-based graphene films have poor sound generation effects.Under the condition of 10 V voltage and 1 cm measuring distance at 20-10000 Hz,the maximum single frequency sound pressure levels of the graphene foam,copper-based graphene film,PET-based graphene film and glass-based graphene film are 59.9,53.5,47.8 and 38.9 d B,respectively.The copper-based graphene film and graphene foam generate one fold frequency sound pressure.The vibration accelerations of the copper-based graphene film and graphene foam were measured for the phenomenon of one fold frequency sound pressure.The results show that the one fold frequency sound pressure generation is related to the vibration of the graphene microphone and that the one fold frequency sound pressure increases with the increases of the input voltage amplitude and frequency.The research results have reference value for the design and application of graphene microphones.

关 键 词：石墨烯薄膜 石墨烯泡沫 发声器 热声效应 一倍频 振动加速度 

分 类 号：O484[理学—固体物理] O429[理学—物理]