超精密测量是支撑光刻机技术发展的基石  

Ultra-precision measurement:The cornerstone of the lithography development

作　　者：谭久彬[1] Tan Jiubin(School of Instrument Science and Engineering,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]哈尔滨工业大学仪器科学与工程学院,哈尔滨150001

出　　处：《仪器仪表学报》2023年第3期1-7,共7页Chinese Journal of Scientific Instrument

摘　　要：光刻机是尖端装备的珠穆朗玛峰。超精密测量是支撑光刻机产品研发与制造,保证光刻机产品制造精度等级与质量水平的基石。本文综述了光刻机产业的特点与发展趋势。在此基础上,从零部件、分系统、整机集成、整机性能层面阐述了超精密测量对光刻机技术发展的支撑作用。分析了光刻机产品精密能力提升的途径和超精密光刻机产业测量体系建立的必要性,包括管控超精密光刻机产品制造质量的工业测量体系和管控光刻机产品工业测量体系量值准确可靠的计量体系。提出了建设光刻机产业计量测试中心的必要性。The lithography machine represents the pinnacle of advanced equipment.The ultra-precision measurement is crucial to supporting the research,development,and manufacturing of these products,ensuring the precision and quality of the manufacturing process.This article provides an overview of the lithography industry's characteristics and development trends,and explores the role of ultra-precision measurement in advancing lithography machine technology,examining its impact on components,subsystems,whole machine integration,and overall performance.The article also considers ways to enhance the precision capabilities of lithography machine products and the need to establish an ultra-precision measurement system,including an industrial measurement system to control the quality of ultra-precision lithography machine products and a metrology system to ensure measurement accuracy and reliability.Finally,the article proposes the necessity of establishing a measurement and testing center for the lithography machine industry.

关 键 词：光刻机 超精密测量 工业测量体系 计量体系 计量测试中心 

分 类 号：TH74[机械工程—光学工程]