基于卡尔曼预测的差动共焦轮廓跟踪测量方法  

Differential confocal profile tracking measurement method based on Kalman prediction

作　　者：罗杰 刘子豪 刘一郡 赵维谦[1,2] 王允[1,2] Luo Jie;Liu Zihao;Liu Yijun;Zhao Weiqian;Wang Yun(School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;MIIT Key Laboratory of Complex-filed Intelligent Exploration,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]北京理工大学“复杂环境智能感测技术”工信部重点实验室,北京100081

出　　处：《仪器仪表学报》2023年第3期25-32,共8页Chinese Journal of Scientific Instrument

基　　金：国家重点研发计划课题(2017YFA0701203);国家杰出青年科学基金(61827826)项目资助。

摘　　要：针对轴向扫描式差动共焦测量法(ASDCM)测量轮廓效率低下问题,提出一种基于卡尔曼预测的差动共焦轮廓跟踪测量方法。该方法使用激光差动共焦轴向响应曲线数百纳米量程的线性区间实现了表面连续轮廓高精度线性传感测量,提高了测量效率;同时引入基于卡尔曼预测器的轮廓跟踪原理利用已测轮廓点数据对未测表面预测并跟踪,扩展了线性传感轮廓测量法测量范围。实验结果表明,该方法相对于ASDCM法测量效率提升了8倍,且实现了轮廓PV值大于线性传感测量范围的标准椭圆柱高精度跟踪测量,激光聚变靶丸内轮廓圆度重复测量标准差达3 nm。为精密元器件表面连续轮廓的高精度、快速、无损测量提供了一种高质量方法。It is difficult to realize high efficiency of axial scanning differential confocal measurement(ASDCM).In this article,a differential confocal profile tracking measurement method based on Kalman prediction is proposed.In this method,the linear range of hundreds of nanometers of laser differential confocal axial response curve is used for high-precision linear sensing measurement of the continuous surface profile,which improves the measurement efficiency.Meanwhile,the Kalman predictor profile tracking method is introduced to predict and track the unmeasured surface using the measured profile point data,which expands the range of linear sensing profile measurement.Compared with the ASDCM,experimental results show that the measurement efficiency of this method is improved by 8 times,the high-precision tracking measurement of the standard elliptical column with the PV value of the outer profile is greater than the linear sensing measurement range,and the repeated measurement standard deviation of the roundness of the laser inertial confinement fusion capsule is 3 nm.It provides a high quality method for high precision,fast and nondestructive measurement of continuous surface profile of rotary precision components.

关 键 词：卡尔曼预测 差动共焦 表面轮廓测量 激光聚变靶丸 

分 类 号：TH742[机械工程—光学工程]