迭代学习在运动台控制系统中的应用研究  

Research on application of iterative learningin motion table control system

作　　者：朱喜 张文涛[1] 杜浩 熊显名[1] ZHU Xi;ZHANG Wentao;DU Hao;XIONG Xianming(School of Electronic Engineering and Automation,Guilin University of Electronic Technology,Guilin 541004,China)

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541004

出　　处：《现代电子技术》2023年第13期97-102,共6页Modern Electronics Technique

基　　金：国家科技重大专项子课题(2017ZX02101007-003);国家自然科学基金项目(61965005);国家自然科学基金项目(62205076);广西自然科学基金项目(2019GXNSFDA185010);广西重点研发计划项目(AB22035047);上海市在线检测与控制技术重点实验室开放基金项目(ZX2021104)。

摘　　要：为了满足晶圆缺陷检测设备运动台对运动轨迹的精确跟踪需求,在重复作业的系统中常采用迭代学习控制,缩短运动台运动的稳定时间,提高半导体检测设备的产率。针对普通的全局PD迭代算法的局限性可能造成系统在特定环节的劣化,实际应用中迭代时间长、次数多,滤波器型迭代学习应用中被控对象模型难以获得等问题,通过拟合实测传递函数,提出基于模型迭代学习的一种前馈控制算法。给出被控对象建模方法,提出改良后的滤波器型迭代学习控制,有效缩短迭代次数,降低运动台的跟踪误差和运动台稳定时间。实验结果表明,改进滤波器型迭代学习控制算法可以减小原来的轴运动的稳定时间30%左右,轴粗动时位置误差的均方根减小了原来的25%,改善了半导体检测设备运动台的轨迹跟踪性能,可以提高半导体检测设备的产率。In order to meet the demand of precise motion trajectory tracking of motion platform of wafer defect detection equipment,iterative learning control is often adopted in the repetitive operation system to shorten the stable time of motion platform and improve the yield of semiconductor detection equipment.Since the limitations of common global PD iterative algorithm may cause the system deterioration in specific links,long iteration time and large number of iteration in practical application,it is difficult to obtain the controlled object model in the application of filter iterative learning.A feedforward control algorithm based on model iterative learning is completed by fitting of the measured transfer function.The modeling method of the controlled object is given.The improved filter type iterative learning control can effectively shorten the iteration period,and reduce the tracking error and the stability time of the motion platform.The experimental results show that the improved filter type iterative learning control algorithm can reduce the stability time of original shaft motion by about 30%and the root mean square of position error of original shaft rough motion by 25%,which can improve the track tracking performance of the motion platform of semiconductor detection equipment and increase the yield of semiconductor detection equipment.

关 键 词：迭代学习 控制系统 被控对象建模 半导体检测 前馈控制 运动轨迹跟踪 

分 类 号：TN876-34[电子电信—信息与通信工程]