摩擦电子学及主动式机械感知  

Tribotronics for active mechanosensation

作　　者：张弛[1,2] 布天昭 ZHANG Chi;BU TianZhao(Beijing Institute of Nanoenergy and Nanosystems,Chinese Academy of Sciences,Beijing 100083,China;School of Nanoscience and Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院北京纳米能源与系统研究所,北京100083 [2]中国科学院大学纳米科学与技术学院,北京100049

出　　处：《中国科学：技术科学》2023年第6期902-916,共15页Scientia Sinica(Technologica)

基　　金：国家自然科学基金(批准号:52250112,52105569);中央高校基本科研业务费专项资金(编号:E1EG6804)项目资助。

摘　　要：摩擦电子学作为摩擦电与半导体耦合的新研究领域,可以通过机械运动产生的摩擦电荷调控半导体中的电传输与转化特性,建立外界环境与半导体器件的直接交互机制,实现各种主动式功能器件,为人机交互、微纳机电系统、传感和自驱动系统等应用提供全新的思路和途径.本文系统地综述了摩擦电子学的研究进展,首先介绍了摩擦电调控场效应作用机理以及摩擦电子学晶体管基础器件;其次介绍了研制的各种摩擦电子学功能器件,展示了其对于外部环境的主动式机械感知;最后对摩擦电子学领域的研究进展及待解决的问题的进行了总结,并展望了该领域未来的发展方向.Tribotronics,as a new research field in the coupling of triboelectricity and semiconductors,can control and tune the electrical transport and conversion characteristics in semiconductors through the triboelectric charges generated by mechanical motion.It can establish a direct interaction mechanism between the external environment and semiconductor devices,realize various active functional devices,and provide new ideas and approaches for applications such as human-machine interfacing,micro-nano electromechanical systems,sensing and self-powered systems.This paper systematically reviews the research progress of tribotronics and functional devices.Firstly,the mechanism of triboelectricity-tuned field effect and the basic devices of tribotronics transistors are introduced.Additionally,various functional devices of tribotronics are introduced,and the active mechanosensation for the external environment is demonstrated.Finally,the research progress and problems to be solved in the field of tribotronics are summarized,and the future development direction of this field is prospected.

关 键 词：摩擦电子学 半导体场效应 场效应晶体管 主动式机械感知 

分 类 号：O441.1[理学—电磁学] TN386[理学—物理]