扫描电镜中扫描透射成像装置的研制及应用  

Development and Application of Scanning Transmission Electron Microscopy Imaging Device

作　　者：赵学平 侯小虎 刘飞 梁绍波 郭春霞 崔晓明[2] 白朴存[2] ZHAO Xueping;HOU Xiaohu;LIU Fei;LIANG Shaobo;GUO Chunxia;CUI Xiaoming;BAI Pucun(Instrumental Analysis&Research Center,Inner Mongolia University of Technology,Hohhot 010051,China;School of Materials Science and Engineering,Inner Mongolia University of Technology,Hohhot 010051,China)

机构地区：[1]内蒙古工业大学测试中心,呼和浩特010051 [2]内蒙古工业大学材料科学与工程学院,呼和浩特010051

出　　处：《实验科学与技术》2023年第3期57-61,共5页Experiment Science and Technology

基　　金：国家自然科学基金(62264013,11762014);内蒙古自治区直属高校基本科研业务费项目(JY20220171,JY20220144,JY20220184)。

摘　　要：使用扫描电镜自带的背散射电子探头(BSED)作透射散射电子探测器,设计了一套适合FEI Quanta 650FEG扫描电镜使用的扫描透射(STEM)成像装置,并制定了该STEM成像装置的操作说明。以埃洛石复合ZrO_(2)纳米颗粒为观察对象,对自制STEM成像装置的实用性进行了验证。结果表明:STEM像衬度与背散射电子探头到样品之间的距离相关,通过调整背散射电子探头与样品之间的距离,可以实现高角环形暗场像的采集,使ZrO_(2)纳米颗粒的亮度明显高于埃洛石;STEM像衬度与透射电镜采集的HAADF-STEM像一致,元素分布状态也与埃洛石和ZrO_(2)纳米颗粒对应,表明所研制的STEM成像装置具有较好的实用性。A set of scanning transmission electron microscopy(STEM)imaging device suitable for FEI Quanta 650FEG scanning electron microscope(SEM)was designed by using the back-scattering electron detector(BSED)of the SEM as the transmissionscattering electron detector,and the operation instructions of the STEM imaging device were formulated.The practicability of selfmade STEM imaging device was verified by using halloysite composite ZrO_(2)nanoparticles as the observation sample.The results show that the contrast of STEM image is related to the distance between the BSED and the sample.By adjusting the distance between the BSED and the sample,the high-angle annular dark field(HAADF)image can be collected,and the brightness of ZrO_(2)nanoparticles is significantly higher than that of halloysite.The contrast of STEM image is consistent with HAADF-STEM image acquired by transmission electron microscope(TEM),and the distribution state of elements is also corresponding to halloysite and ZrO_(2)nanoparticles,indicating that the STEM imaging device has good practicability.

关 键 词：扫描电镜 扫描透射电镜 成像装置 像衬度 高角环形暗场像 

分 类 号：TN16[电子电信—物理电子学]