阴极弧蒸发和高功率脉冲磁控溅射TiAlN涂层的性能研究  

Research on Properties of TiAlN Coatings Prepared by Cathode Arc Evaporation and High-Power Impulse Magnetron Sputtering

作　　者：吴明晶 王北川 张国飞 李佳 陈利 Wu Mingjing;Wang Beichuan;Zhang Guofei;Li Jia;Chen Li(Zhuzhou Cemented Carbide Cutting Tools Co.,Ltd,Zhuzhou Hunan 412007,China;State Key Laboratory of Powder Metallurgy,Central South University,Changsha Hunan 410083,China)

机构地区：[1]株洲钻石切削刀具股份有限公司,湖南株洲412007 [2]中南大学粉末冶金国家重点实验室,湖南长沙410083

出　　处：《硬质合金》2023年第3期181-186,共6页Cemented Carbides

基　　金：国家自然科学基金《TiSiN/TiAlN纳米多层的共格界面强化机制及其力学和热性能研究》(51775560)。

摘　　要：为对比研究阴极弧蒸发(CAE)和高功率脉冲磁控溅射(HiPIMS)两种工艺对TiAlN涂层结构、硬度、热稳定性及抗氧化性能的影响,本文采用两种方法制备了成分相同的Ti_(0.38)Al_(0.62)N涂层,使用能量色散X射线光谱仪(EDX)、X射线衍射仪(XRD)、扫描电镜(SEM)、纳米压痕仪分析了涂层的成分、微观结构、力学性能、热稳定性和抗氧化性。两种涂层均呈面心立方结构;CAE涂层呈现大量的“液滴”缺陷,而HiPIMS涂层表面质量更优;CAE涂层硬度(~32.7GPa)略高于HiPIMS涂层(~31.8 GPa);HiPIMS涂层具有更高的热稳定性,CAE涂层在800℃达到硬度最高值~36.2 GPa,而HiPIMS涂层在900℃硬度达到最高~34.3 GPa,且随温度的升高,CAE涂层硬度下降更快。HiPIMS涂层表现出更好的抗氧化性能,在800℃氧化30 h后,CAE和HiPIMS制备的两种涂层的氧化层厚度分别为~630.7 nm和~589.3 nm。To investigate the effect of two technologies named cathode arc evaporation(CAE)and high-power impulse magnetron sputtering(HiPIMS)on the structure,hardness,thermal stability,and oxidation resistance of TiAlN coatings,This paper prepared Ti_(0.38)Al_(0.62)N coatings with the same composition by these technologies.The composition,microstructure,mechanical properties,thermal stability,and oxidation resistance of Ti0.38Al0.62N coatings were studied by using an energydispersive X-ray spectrometer(EDX),X-ray diffractometer(XRD),scanning electron microscope(SEM),and nanoindenter.Both coatings exhibit a face-centered cubic(fcc-)structure.The paper discovered plenty of“droplet”defects on the coating prepared by CAE,while the coating prepared by HiPIMS had better surface quality.The hardness of the coating prepared by CAE was about 32.7 GPa,which was slightly harder than that of the coating prepared by HiPIMS(about 31.8 GPa).In addition,the coating prepared by HiPIMS had better thermal stability.the coating prepared by CAE exhibited the highest hardness of about 36.2 GPa at 800℃,while the coating prepared by HiPIMS showed the highest hardness of about 34.3 GPa at 900℃.In addition,as the temperature rose,the hardness of the coating prepared by CAE decreased faster.The coating prepared by HiPIMS showed better oxidation resistance,and after 30 h of oxidation at 800℃,the oxide layer thickness of coatings by HiPIMS and CAE were about 630.7 and 589.3 nm.

关 键 词：TIALN涂层 阴极弧蒸发 高功率脉冲磁控溅射 硬度 热稳定性 抗氧化性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]