磁控溅射法制备氧化锆涂层及其绝缘性能研究  

Preparation and insulation properties of zirconia coating by magnetron sputtering

作　　者：徐文慧 刘杰 袁志响 吴泊鋆 卢文壮[1] Xu Wenhui;Liu Jie;Yuan Zhixiang;Wu Bojun;Lu Wenzhuang(School of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《电镀与精饰》2023年第7期68-73,共6页Plating & Finishing

基　　金：国家自然科学基金项目(51975287)。

摘　　要：电机轴承的绝缘对于提高电动汽车的电机寿命具有重要意义。采用直流反应磁控溅射方法和正交试验设计,研究了工作气压、氧气流量和沉积温度对ZrO_(2)绝缘涂层的影响。采用扫描电镜、X射线衍射仪及数字兆欧表对ZrO_(2)涂层进行截面形貌、表面形貌、涂层厚度、物相结构及绝缘性能进行分析。结果表明:绝缘电阻与涂层厚度的比值R/t最低为635 MΩ/μm时,涂层厚度为1.639μm,绝缘电阻值为1041 MΩ;制备的ZrO_(2)涂层结构较为致密,呈现非晶态或单斜相,随着沉积温度和氧气流量的增加,ZrO_(2)涂层结晶明显,且有M-ZrO_(2)(‒111)晶面择优取向;氧气流量对涂层厚度影响最大,沉积温度对R/t的影响最大;涂层内部缺陷的增加和结构的疏松使得涂层绝缘性能降低,而涂层结晶度的增高及M-ZrO_(2)(‒111)晶面的择优取向会使涂层绝缘性能增强。The insulation of motor bearings is of great significance for improving the motor life of electric vehicles.The effects of working air pressure,oxygen flow rate and deposition temperature on ZrO_(2)insulating coating were studied by DC reactive magnetron sputtering method and orthogonal experimental design.The cross section morphology,surface morphology,phase structure,coating thickness and insulation properties of ZrO_(2)coating were analyzed by scanning electron microscope,X-ray diffractometer and digital megohmeter.The results show that when the ratio of insulation resistance to coating thickness R/t is 635 MΩ/μm,the coating thickness is 1.639μm,and the insulation resistance value is 1041 MΩ.The structure of the prepared ZrO_(2)coating is relatively dense,showing amorphous or monoclinic phase.With the increase of deposition temperature and oxygen flow rate,the ZrO_(2)coating crystallizes obviously,and has the preferred orientation of M-ZrO_(2)(‒111)crystal plane.The oxygen flow rate has the greatest effect on the coating thickness,and the deposition temperature has the greatest effect on R/t.The increase of internal defects and the loose structure of the coating will reduce the insulation performance of the coating,but the increase of crystallinity and the preferred orientation of M-ZrO_(2)(‒111)crystal surface will enhance the insulation performance of the coating.

关 键 词：ZrO_(2)涂层 绝缘性能 涂层厚度 微观结构 磁控溅射 

分 类 号：TB43[一般工业技术]