导模共振滤波器用二氧化钛薄膜制备及研究  

Preparation and Study of Titanium Dioxide Thin Films for Guided-Mode Resonance Filter

作　　者：张贺[1] 平奕晨 屈飞[1] Zhang He;Ping Yichen;Qu Fei(Research Department of Micro-Nano Fabrication Technology and Intelligent Electronic Equipment Devices,Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]中国科学院电工研究所微纳加工技术和智能电气设备研究部,北京100190

出　　处：《光学学报》2023年第9期294-300,共7页Acta Optica Sinica

基　　金：国家重点研发计划(2019YFB1503502);慧眼行动项目。

摘　　要：利用原子层沉积技术在具有二维结构的石英玻璃上制备出二氧化钛(TiO_(2))薄膜,并在不同的温度下进行退火处理。对样品的晶体结构、表面形貌、表面粗糙度以及光谱特性进行研究,结果表明:当热处理温度为200~400℃时,所制备的二氧化钛薄膜具有较好的锐钛矿结构,无其他杂相存在。随着热处理温度的增加,薄膜晶粒尺寸逐渐增大,薄膜折射率变大,但表面粗糙度均小于0.4 nm。研究了由单层二维结构光栅和光波导层(二氧化钛薄膜)组成的导模共振滤波器,采用严格耦合波理论分析了该装置在不同条件下的光谱特性。结果表明,通过改变光波导层二氧化钛薄膜的折射率,可以控制该装置共振波长的位置,并保持窄线宽特性。该装置的波长控制范围为946.9~967.9 nm,半峰全宽小于0.8 nm。Objective Titanium dioxide(TiO_(2))photonic crystals can be applied to prepare guided-mode resonance(GMR)filters that allow gratings to have high reflectance at resonance wavelengths.A GMR filter is a photonic crystal resonant reflector with a perfect resonant reflection of incident light with specific polarizations in arbitrarily narrow bands while allowing the light in other wavelengths to pass through.In China,few studies have been conducted on GMR filters prepared from TiO_(2) films.The current research on GMR filters mainly focuses on the design of GMR filters,such as sub-wavelength grating GMR filters with tunable resonance wavelengths,but their structures are more complex,which makes device fabrication difficult to be realized.In this work,a GMR filter is prepared by depositing a thin film of TiO_(2) on a two-dimensional patterned photonic crystal grating structure as an optical waveguide layer by atomic layer deposition(ALD).The device can produce high reflectance at the resonance wavelengths.The band of resonance wavelengths is sensitive to the refractive index of the filling material in the grating region.By controlling the refractive index of the TiO_(2) film,the resonance wavelength of the device can be precisely controlled,and an efficient and controllable narrow linewidth filter can be prepared.Methods In this present experiment,TiO_(2) films are deposited on a two-dimensional patterned quartz glass by the ALD technique,and then the prepared TiO_(2) films are annealed at different temperatures to have different refractive indices.Then we simulate the reflection spectrum of the filters by using the rigorous coupled wave algorithm(RCWA).In addition,we use a D8 X-ray diffractometer(XRD)from Bruker for the phase identification and structure analysis,a SIGMA 500 field emission scanning electron microscope(FESEM)from ZEISS for microstructure analysis,an ICON2-SYS atomic force microscope(AFM)from Bruker for surface roughness analysis,and a spectroscopic ellipsometer(SE 850 DUV)from Sentech for thickness an

关 键 词：薄膜 二氧化钛 原子层沉积 导模共振 严格耦合波理论 共振波长 

分 类 号：TB321[一般工业技术—材料科学与工程]