基于反馈加权3D-GS算法的三维多焦点调控方法研究  

Three-Dimensional Multi-Focus Controlling Method Based on Feedback-Weighted 3D-GS Algorithm

作　　者：翟中生[1] 李梦雨 吕清花[2] 王选择[1] 冯维[1] 熊芝[1] Zhai Zhongsheng;Li Mengyu;LüQinghua;Wang Xuanze;Feng Wei;Xiong ZhiHubei(Key Laboratory of Modern Manufacturing Quantity Engineering,School of Mechanical Engineering,Hubei University of Technology,Wuhan 430068,Hubei,China;School of Science,Hubei University of Technology,Wuhan 430068,Hubei,China)

机构地区：[1]湖北工业大学机械工程学院现代制造质量工程湖北省重点实验室,湖北武汉430068 [2]湖北工业大学理学院,湖北武汉430068

出　　处：《中国激光》2023年第10期112-120,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金(32071457);湖北省创新群体项目(2022CFA006);武汉市重点研发计划(2022012202015034)。

摘　　要：针对超快激光三维多焦点均匀性不高的问题,本文提出了一种基于反馈加权3D-GS算法的三维多焦点光场重建技术。用CCD相机实时采集多焦点的能量和位置信息,优化全息图,然后将优化后的全息图加载至空间光调制器,得到目标结构的高均匀性三维多焦点光束。利用此方法实现了4个面47个点的“HBUT”三维多焦点结构以及15个面15个点的三维多焦点螺旋结构,前者的多光束均匀性超过了96%,后者的多光束均匀性达到了94%。将传统3D-GS算法与反馈加权3D-GS算法迭代计算得到的上述两种结构的多焦点能量分布结果进行对比,结果显示,反馈加权3D-GS算法能有效提高三维多焦点的焦斑能量分布均匀性。Objective Ultrafast laser direct writing processing technology with a single focus has a small processing area and low energy utilization and is not suitable for applications in large-area processing,volume processing,and the single forming of structures.To solve these problems,researchers generally adopt multibeam parallel processing method.The most important aspect of parallel processing technology is to realize three-dimensional(3D)multibeams and form 3D multi-focus with the same energy.Therefore,a method for generating 3D multi-focus is urgently required.In industrial applications,laser focusing requires precise control to obtain high quality results.Moreover,in the actual optical path,setup and manufacturing errors exist in the optical elements and have a significant impact on the final machining results;however,the existing iterative algorithms rarely compensate for such errors.Therefore,a 3D multi-focus control method based on a feedback-weighted 3D-GS algorithm is proposed in this study.Methods A spatial light modulator(SLM)can adjust optical parameters such as amplitude,phase,and polarization of a laser beam by loading computer-generated holograms.With the help of SLM,the light intensity distribution in the target region can be easily controlled.The key to obtaining uniform 3D multiple beams with SLM is to obtain the corresponding computer-generated holograms,which can then be used to flexibly control the number,position,and focus energy distribution of the outgoing laser beam.In this study,to improve the uniformity of the energy distribution of multiple beams,a feedback method was used to improve the traditional 3D-GS algorithm.Each beam was set using a weight coefficient.The feedback-weighted 3D-GS algorithm collected the energy and position information of multiple foci through a CCD camera in real time and fed the information back to the controlling terminal to dynamically adjust the weight coefficient of each beam.After a couple of iterations,3D multi-focus with high uniformity were obtained.Results

关 键 词：激光光学 反馈加权3D-GS算法 三维多焦点 光场重建 高均匀性 空间光调制器 

分 类 号：O436.[机械工程—光学工程]