基于柔性铰链的手动微位移调整平台设计  

Design of manual micro-displacement adjustment platform based on flexible hinges

作　　者：崔良玉 方晨凯 丁楠 韩建鑫[1,2] 崔华程 靳刚 CUI Liangyu;FAGN Chenkai;DING Nan;HAN Jianxin;CUI Huacheng;JIN Gang(School of Mechanical Engineering,Tianjin University of Technology and Education,Tianjin 300222,China;Tianjin Key Laboratory of High Speed Cutting and Precision Machining,Tianjin 300222,China;School of Electronic Engineering,Tianjin University of Technology and Education,Tianjin 300222,China)

机构地区：[1]天津职业技术师范大学机械工程学院,天津300222 [2]天津职业技术师范大学天津市高速切削与精密加工重点实验室,天津300222 [3]天津职业技术师范大学电子工程学院,天津300222

出　　处：《天津职业技术师范大学学报》2023年第2期27-31,共5页Journal of Tianjin University of Technology and Education

基　　金：天津市自然科学基金重点项目(22JCZDJC00740);天津市教委科研计划项目(2022ZD030);天津市大学生创新创业训练计划项目(202110066093).

摘　　要：为了实现低成本的微纳米级微位移调整,文章基于柔性铰链直线位移与寄生位移的关系,设计了一种由测微头驱动的单自由度微位移调整平台。介绍了该微调平台的结构组成及工作原理,建立了微调平台缩小倍数即输入-输出关系的理论模型。通过关键尺寸赋值,得到一种结构紧凑的缩小倍数为47的手动微调平台,通过测微头输入步长为10μm的位移,最小输出位移为213 nm,输入范围为0~600μm,输出范围为0~13μm。采用Ansys Workbench仿真软件对微调平台的刚度、应力及输入-输出关系进行有限元验证,验证了该设计方案的可行性。In order to achieve low-cost micro/nano displacement adjusting,the single degree of freedom micro displacement adjusting platform driven by a micrometer head is designed based on the relationship between linear displacement and parasitic displacement of flexible hinges.The structural composition and working principle of the micro displacement adjusting platform were introduced,and the theoretical model of the input-output relationship was built which is the reduction factor of the fine-tuning platform.By assigning key dimensions,a compact manual micro displacement adjusting platform is obtained with a reduction factor being 47,with an input step size being 10μm through the micrometer head,a minimum output displacement will be 213 nm,while the input range and output range is 0-600μm and 0-13μm respectively.The Ansys Workbench simulation software was used to conduct finite element verification on the stiffness,stress,and input-output relationship in the micro displacement adjusting platform,and the results verified the feasibility of this scheme.

关 键 词：微调平台 柔性铰链 测微头 低成本 

分 类 号：TH703[机械工程—仪器科学与技术]