M5211-6-UM 型立式硼扩散设备研制  

Development of M5211-6-UM Vertical Boron Diffusion Equipment

作　　者：吴志明 郭浩 赵志然 WU Zhi-ming;GUO Hao;ZHAO Zhi-ran

机构地区：[1]湖南红太阳光电科技有限公司,湖南长沙410111

出　　处：《有色设备》2023年第3期21-24,共4页Nonferrous Metallurgical Equipment

摘　　要：M5211-6-UM型立式硼扩散炉用于晶体硅太阳能电池片硼扩散工艺,具有全自动化、高产能、低能耗、维护便捷等特点。本文介绍了该型号设备的结构组成及性能,给出了能耗和工艺结果,结果表明该设备各方面性能已达到国内领先水平,具备产业化条件。M5211-6-UM vertical boron diffusion furnace is used in boron diffusion process of crystalline silicon solar cells,which has the characteristics of full automation,high capacity,low energy consump-tion and convenient maintenance.This paper introduces the structure and performance of this type of e-quipment,and gives the energy consumption and process results.The results show that the equipment has reached the leading level in China and has the conditions for industrialization.

关 键 词：硼扩散 石英舟 方阻均匀性 

分 类 号：TM914.41[电气工程—电力电子与电力传动]