单端口声表面波谐振器在片去嵌方法分析  

Analysis of On-Wafer De-Embedding Method for One-Port SAW Resonator

作　　者：韩晓宇 帅垚[1] 吴传贵[1] 罗文博[1] 潘忻强[1] 张万里[1] HAN Xiaoyu;SHUAI Yao;WU Chuangui;LUO Wenbo;PAN Xinqiang;ZHANG Wanli(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都611731

出　　处：《压电与声光》2023年第3期342-345,共4页Piezoelectrics & Acoustooptics

摘　　要：为了准确地设计声表滤波器,需要从参考声表面波(SAW)谐振器的测量值中提取精确的材料参数。测量SAW谐振器时,单个谐振器无法直接进行测试,需要引出传输线并使用GSG或GS探针进行测量,消除传输线影响的去嵌入过程对于SAW谐振器材料参数的准确提取非常重要。该文介绍了几种声表面波谐振器的去嵌入技术,包括Open-Short算法、电磁仿真方法、分段等效电路模型方法、集总参数等效电路法。通过实例验证了几种常用的去嵌方法并对其进行了分析。In order to accurately design the SAW filter,it is necessary to extract accurate material parameters from the measured values of the reference SAW resonator.When measuring the SAW resonator,a single resonator cannot be directly tested,and a transmission line is required to contact the probe for measurement.The process of removing the influence of the transmission line is very important for the accurate extraction of SAW resonator material parameters.In this paper,several de-embedding methods of SAW resonators are introduced,including Open-Short algorithm,electromagnetic simulation method,segmented equivalent circuit model method,lumped parameter equivalent circuit method,and several commonly used de-embedding methods are verified and analyzed with examples.

关 键 词：去嵌入 SAW谐振器 机电耦合系数 等效电路 集总参数法 

分 类 号：TN384[电子电信—物理电子学] TN65