Al_(2)O_(3)系微波介质陶瓷的流延制备及低温烧结研究  

Study on Tape Casting and Low-Temperature Sintering of Al_(2)O_(3) Microwave Dielectric Ceramics

作　　者：梁雪 李照 LIANG Xue;LI Zhao(XIAN Chuang Lian Electric Technology(Group)Co.,Ltd.,Xi’an 710000,China)

机构地区：[1]西安创联电气科技(集团)有限责任公司,陕西西安710000

出　　处：《压电与声光》2023年第3期384-388,共5页Piezoelectrics & Acoustooptics

摘　　要：为了获得低温烧结的微波介质陶瓷,该文采用固相法制备了Al_(2)O_(3)-SiO_(2)-(Li_(2)O-B_(2)O_(3)-SiO_(2)-CaO-Al_(2)O_(3))系微波介质陶瓷粉体,并添加聚乙烯醇缩丁醛、丙三醇、鲱鱼油、乙醇、乙酸乙酯等配成料浆,利用流延成型技术获得微波介质膜带。对不同配比下制备的膜带表面形貌进行扫描电子显微镜(SEM)观察分析,结果表明,当质量比m(粉体)∶m(PVB)∶m(丙三醇)∶m(鲱鱼油)∶m(乙醇+乙酸乙酯)=25∶15∶2∶1∶7时,膜带样品的表面颗粒分布更均匀。测量不同温度下该膜带样品的烧结密度及烧结收缩率,得到在870℃时膜带样品的密度及收缩率达到最大。此外,对膜带样品与Ag电极共烧后的断面形貌进行了扫描电子显微镜(SEM)观察分析,结果表明,在870℃下,流延膜带与Ag电极共烧良好。In order to obtain microwave dielectric ceramics sintered at low temperature,the Al_(2)O_(3)-SiO_(2)-(Li_(2)O-B_(2)O_(3)-SiO_(2)-CaO-Al_(2)O_(3))system microwave dielectric ceramic powders were prepared by the solid-state sintering method in this paper,and the Polyvinyl Butyral(PVB),glycerol,herring oil,ethanol and ethyl acetate were added to prepare the slurry,the microwave dielectric tape was obtained by the tape casting process.The surface morphology of the tape prepared at different proportions was analyzed by the scanning electron microscope(SEM).The results showed that the distribution of particles on the surface of the tape was more uniform when the mass ratio of PVB,glycerol,herring oil,ethanol and ethyl acetate was 25∶15∶2∶1∶7.The sintered density and sintered shrinkage ratio of the tape sample at different temperatures were measured and analyzed.The results showed that the density and shrinkage ratio of the tape samples reached the maximum at 870℃.In addition,the cross-section morphology of the tape sample after co-firing with Ag electrode was observed and analyzed by SEM,and the results showed that the tape was well co-fired with Ag electrode at 870℃.

关 键 词：Al_(2)O_(3)微波陶瓷 流延工艺 低温共烧 固相反应 

分 类 号：TN385[电子电信—物理电子学] TN804