基于Fabry-Perot的高灵敏度局部放电检测传感器  

High-sensitivity partial discharge detection sensor based on Fabry-Perot

作　　者：吴明孝 李雪桓 周少珍 杨威 付刚 WU Mingxiao;LI Xuehuan;ZHOU Shaozhen;YANG Wei;FU Gang(State Grid Henan Electric Power Research Institute,Zhengzhou 450000,China)

机构地区：[1]国网河南省电力公司电力科学研究院,河南郑州450000

出　　处：《传感器与微系统》2023年第7期90-93,共4页Transducer and Microsystem Technologies

基　　金：国网河南省电力公司科技攻关项目(002126)。

摘　　要：提出了一种用于局部放电检测的高灵敏度微型光纤法布里—珀罗(F-P)传感器。利用MEMS技术由单模光纤端面和具有波纹结构的氮化硅(Si3N4)膜构成。实验分析了传感器不同膜片结构的性能。结果表明:所提出的传感器1 kHz声信号下,声压为38.86 mPa时,信噪比为80.18 dB,最小可探测声压为3.07μPa/Hz1/2。此外,该传感器具有平坦的频率响应和线性的声压响应,同时具有极高的灵敏度和微小的尺寸,适合局部放电的检测实际应用。A high-sensitivity miniature optical fiber Fabry-Perot(F-P)sensor for partial discharge detection is presented.The sensor is composed of a single-mode fiber end face and a silicon nitride(Si_(3)N_(4))film with a corrugated structure using MEMS technology.The performane of sensor with different membrane structures is analyzed by experiment.Experimental results show that the sensor has a signal-to-noise ratio of 80.18 dB under 1 kHz sound signal and sound pressure of 38.86 mPa,and the minimum detectable sound pressure is 3.07μPa/Hz^(1/2).In addition,the sensor has a flat frequency response and a linear sound pressure response,as well as extremely high sensitivity and a small size,which is very suitable for practical application of partial discharge detection.

关 键 词：光纤传感器 光纤法布里—珀罗 氮化硅膜 波纹膜结构 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP216.1[自动化与计算机技术—控制科学与工程]