压缩超快摄影捕获光脉冲在光刻胶中的运动  

Capturing the motion of laser pulse in photoresist with compressed ultrafast photography

作　　者：许彬 丁毅 刘馨悦 杜梓浩 詹晓江 马钊 李英荣 XU Bin;DING Yi;LIU Xinyue;DU ZiHao;ZHAN Xiaojiang;MA Zhao;LI Yingrong(Department of intelligent manufacturing,Wuyi University,Jiangmen 529020,China)

机构地区：[1]五邑大学智能制造学部,广东江门529000

出　　处：《光学技术》2023年第3期264-269,共6页Optical Technique

基　　金：国家自然科学基金(62075168);广东省普通高校创新团队项目(2021KCXTD051)。

摘　　要：在超快时间尺度上以二维空间分辨率揭示激光脉冲在光刻胶之间的运动过程,将有助于了解激光加工过程和优化加工工艺。然而现有记录激光脉冲在光刻胶中运动过程的成像技术都存在需要多次重复拍摄或时间分辨率受限等问题。为了克服这些问题,通过使用压缩超快摄影来观测光刻胶中激光脉冲的运动。实验结果表明,搭建的实验系统能以1.54×10^(11)fps的帧率,单次成像数百帧的图像序列深度,实时观测到这一不可重复的超快事件。Revealing the motion of laser pulses between photoresists at ultrafast time scales with two-dimensional spatial resolution will help to understand the laser processing and optimize the process.However,most existing imaging technologies for recording the motion of laser pulses in photoresists suffer from the problems such as requiring multiple repeated shots or limited time resolution.To overcome these problems,compressed ultrafast photography(CUP)is proposed to capture the motion of laser pulses in photoresists.The experimental result shows that the motion process of nonrepeatable events can be captured with single shot at the time-resolution about 1.54×10^(11) fps,the depth of the imaging sequence reaches hundreds of frames.

关 键 词：超快成像 压缩感知技术 飞秒激光脉冲 光刻胶 

分 类 号：TN249[电子电信—物理电子学]