高性能中波红外陷波滤光片设计与研制  

Theoretical design and preparation of high performance MWiR notch filter

作　　者：尚鹏 陈蓓曦[3] 孙鹏 刘华松[2] 白金林[2] 季一勤 曹波[1] 马远飞 林泉 SHANG Peng;CHEN Bei-xi;SUN Peng;LIU Hua-song;BAI Jin-lin;JI Yi-qin;CAO Bo;MA Yuan-fei;LIN Quan(GRINM Guojing Advanced Materials Co.,Ltd,General Research Institute for Nonferrous Metals,Beijing 100088,China;Tianjin Key Laboratory of Optical Thin Film,Tianjin Jinhang Technical Physics Institute,Tianjin 300308,China;Northwestern Polytechnical University,Xi’an 710129,China)

机构地区：[1]有研国晶辉新材料有限公司、北京有色金属研究总院,北京100088 [2]天津津航技术物理研究所、天津市薄膜光学重点实验室,天津300308 [3]西北工业大学,陕西西安710129

出　　处：《中国光学（中英文）》2023年第4期904-915,共12页Chinese Optics

基　　金：国家自然科学基金(No.61905179);河北省自然科学基金(No.F2022103002);河北省重点研发计划项目(No.22351101D)。

摘　　要：为了有效抑制4.3μm CO_(2)辐射对3μm~5μm中波红外目标信号的干扰,基于Needle随机插层优化算法,采用电子束蒸发方法,建立了石英晶振监控方式下多层超厚Ge/Al_(2)O_(3)薄膜生长误差的精确反演修正模型,实现了中波红外陷波滤光片的设计、精确反演与制备;同时,针对中波红外陷波滤光片存在的面型变化大的问题,采用预置基底面型方法,实现了中波红外陷波滤光片低面型调控。研究结果表明:随着镀膜时间的增加,高折射率Ge膜具有较好的生长稳定性,而低折射率Al_(2)O_(3)薄膜材料沉积比例因子变化高达11.9%,且呈规律性渐变趋势;所制备的中波红外陷波滤光片在4.2μm~4.5μm波段区间平均截止透过率小于0.3%;3.5μm~4.05μm及4.7μm~5.0μm波段的平均透过率大于95%,镀膜后的面型被有效控制在较小范围;膜层具有较好的复杂环境适应性,成功通过了GJB 2485-95中牢固性、高温、低温、湿热等环境试验考核。In order to effectively suppress the interference of CO_(2)radiation 4.3μm on MWiR target signal with wavelength of 3μm−5μm,based on the Needle random intercalation optimization algorithm,an accurate inversion correction model for the growth error of multi-layer ultra-thick Ge/Al_(2)O_(3)films under quartz crystal monitoring is established by the electron beam evaporation method,thus realizing the design,the accurate inversion and the accurate preparation of MWiR notch filter.In order to solve the problem that the surface profile of the MWiR notch filter changes greatly,the preset substrate surface method is used to realize the low surface profile regulation of MWiR notch filter.The results show that the high refractive index Ge film has good deposition stability with the increase of coating time,while the deposition scale factor of low refractive index Al_(2)O_(3)thin film changes up to 11.9%in a regular gradual trend.For the prepared MWiR notch filter,the average cut-off transmittance is less than 0.3%in the wavelength range of 4.2μm−4.5μm,and the average transmittances are more than 95%in the wavelength range of 3.5μm−4.05μm and 4.7μm−5.0μm.The surface profile of the substrate after coating can be effectively controlled in a small range.The film has good adaptability to complex environment,and has successfully passed the environmental test of firmness,high temperature,low temperature and damp heat specified in GJB 2485-95.

关 键 词：电子束蒸发法 石英晶振监控法 红外滤光片 薄膜 反演修正 

分 类 号：O484[理学—固体物理]