硅基底铜基材料电极制备及其储能特性研究  

Preparation and Energy Storage Properties of Copper-Based Electrode on Silicon Substrate

作　　者：张文磊 王伟恒 柴宸宇 孙永娇 胡杰 李刚[2] ZHANG Wenlei;WANG Weiheng;CHAI Chenyu;SUN Yongjiao;HU Jie;LI Gang(Micro-Nano System Research Center,College of Information and Computer,Jinzhong 030600,China;Institute of Energy Innovation,College of Materials Science and Engineering,Taiyuan University of Technology,Taiyuan 030024,China)

机构地区：[1]太原理工大学信息与计算机学院微纳系统研究中心,山西晋中030600 [2]太原理工大学材料科学与工程学院能源革命创新研究院,太原030024

出　　处：《太原理工大学学报》2023年第4期655-662,共8页Journal of Taiyuan University of Technology

基　　金：国家自然科学基金青年基金资助项目(52005363)。

摘　　要：【目的】以过渡金属氧化物、硫化物、氢氧化物为代表的赝电容材料由于其良好的比电容容值、高功率密度和低成本等优势,被广泛用于宏观常规超级电容器的电极中。然而,当前对于过渡金属电极的研究多采用非常温下合成,辅以导电剂、粘合剂固定的加工工艺,制约了其在以硅基底为主的微型超级电容器(micro-supercapacitor,MSC)中的应用。【方法】在硅基底上沉积了钛集流体和铜薄膜,通过兼容微加工工艺的常温原位氧化法制备了氢氧化铜纳米线,并进一步通过浸泡硫化钠溶液实现了原位硫化。【结论】测试结果表明,在1 mA/cm^(2)的电流密度下,硅基底硫化铜的比电容为166.98 mF/cm^(2),较氢氧化铜电极提升了6.68倍,500次充放电循环后电容保持率为74.2%,展现了其在硅基微型超级电容器方面广阔的应用前景。【Purposes】Transition element oxides,sulfides,and hydroxides are widely used as a kind of pseudocapacitance materials owing to their excellent theoretical specific capacitance,high power density,and low cost.However,most of the transition element-based electrodes are fabricated under abnormal temperatures combined with conductive agent and binder,which deeply restricts their application towards silicon-based micro-supercapacitor(MSC).【Methods】In this research,one layer of titanium collector was deposited on the silicon substrate followed by the sputtering of copper film.The copper hydroxide nanowire was fabricated through an in-situ wet oxidation method at room temperature.The copper sulfide was further synthetized by soaking above product in sodium sulfide solution for enhancing energy storage properties.The synthetise method showed a good compatibility with traditional silicon micro fabrication.【Conclusion】The results showed that in 1.0 mol/L sodium sulfate electrolyte,the copper sulfide electrode exhibited high average areal capacitance of 166.98 mF/cm^(2) at the current density of 1 mA/cm^(2),which was 6.68 times than that of copper hydroxide electrode.After 500 cycles,74.2%of the areal capacitance was preserved.The copper-based electrodes reported here could have a wide application prospect in silicon-based micro-supercapacitor.

关 键 词：硫化铜 氢氧化铜 硅基底 超级电容器 储能特性 

分 类 号：TB383[一般工业技术—材料科学与工程]