集成电路芯片厂的无尘室空气过滤器选型分析  

Analysis of Air Filter Selection in Clean Room of IC Chip Factory

作　　者：王伯圣 WANG Bosheng(Shanghai KEE Electromechanical System Engineering Co.,Ltd,China)

机构地区：[1]上海精泰机电系统工程有限公司,上海200136

出　　处：《集成电路应用》2023年第6期60-61,共2页Application of IC

摘　　要：阐述集成电路芯片厂Fab无尘室空气含尘浓度、风量、大气含尘浓度、换气次数、过滤器效率参数,验证空气过滤器选型与洁净度等级的要求。探讨芯片厂化学过滤器选型设计指标的经验分享分析。This paper describes the parameters of air dust concentration,air volume,air dust concentration,air exchange rate,filter efficiency in Fab clean room of IC chip factory,and verifies the requirements of air filter selection and cleanliness level.Discuss the experience sharing analysis of chemical filter selection and design indicators of chip factory.

关 键 词：集成电路制造 无尘室 过滤器效率 

分 类 号：TN405[电子电信—微电子学与固体电子学]