柔性有机发光二极管的薄膜封装研究进展  

Research on Thin Film Encapsulation of Flexible Organic Light-Emitting Diodes

作　　者：周钰卜 高桦宇 郑华[2] 邹建华 林生晃 李显博 刘佰全 ZHOU Yubu;GAO Huayu;ZHENG Hua;ZOU Jianhua;LIN Shenghuang;LI Xianbo;LIU Baiquan(School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510006,China;School of Electrical Engineering&Intelligentization,Dongguan University of Technology,Dongguan 523808,China;Guangzhou New Vision Opto-Electronic Technology Co.,Ltd.,Guangzhou 510630,China;Songshan Lake Materials Laboratory,Dongguan 523808,China)

机构地区：[1]中山大学电子与信息工程学院,广州510006 [2]东莞理工学院电信工程与智能化学院,广东东莞523808 [3]广州新视界光电科技有限公司,广州510630 [4]松山湖材料实验室,广东东莞523808

出　　处：《电子与封装》2023年第7期10-16,共7页Electronics & Packaging

基　　金：国家自然科学基金(62104265);广东省科技计划(2021A0505110009);东莞市重点领域研发项目(20201200300102)。

摘　　要：柔性有机发光二极管(OLED)因使用柔性衬底而对环境中的水氧更加敏感,这对封装技术提出了更高的要求。目前,柔性OLED封装技术中最具希望的发展方向是可柔性化、水氧隔离能力优异的薄膜封装(TFE)技术。TFE是在OLED表面制备一层或者多层超薄的薄膜材料,以阻隔水氧侵蚀的封装技术,其关键在于制备水氧隔离能力优异的薄膜并避免对OLED器件性能产生影响。介绍了柔性OLED的衬底选择和传统的刚性封装技术,阐明了TFE的优势,通过无机/有机薄膜的制备及TFE采用的在线封装和离线封装2种方法,对柔性TFE的发展现状进行了总结,并对柔性TFE的发展做出了展望。Flexible organic light-emitting diodes(OLEDs)are more sensitive to water and oxygen in the environment due to the use of flexible substrates,and higher demands on the encapsulation technology are placed.Currently,the most promising development direction of flexible OLED encapsulation technology is the thin film encapsulation(TFE)technology with flexibility and excellent water-oxygen isolation.TFE is an encapsulation technology that fabricates one layer or multiple layers of thin film on the surface of OLEDs to block the water-oxygen erosion.The key to TFE is fabricating films with excellent water-oxygen barrier ability and avoiding the impact on OLED performance.The substrate selection of flexible OLEDs and the traditional rigid encapsulation technology are introduced to elucidate the advantages of TFE.By reviewing the manufacturing processes of inorganic/organic films and the two methods of online and offline encapsulation used for TFE,the current status of the development of flexible TFE is summarized and the future development of flexible TFE is prospected.

关 键 词：有机发光二极管 柔性 薄膜封装 水氧透过率 稳定性 

分 类 号：TN383.1[电子电信—物理电子学]