激励信号对无驱动MEMS陀螺输出灵敏度的影响  

Influence of Excitation Signal on Output Sensitivity of Driverless MEMS Gyroscope

作　　者：徐聪[1] 张伟[1] 郭子龙 XU Cong;ZHANG Wei;GUO Ziong(School of Instrument Science and Optoelectronic Engineering,Beijing University of Information Technology,Beijing 100101,China;School of Optoelectronic Engineering,Xi'an University of Technology,Xi'an 710021,China)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院,北京100101 [2]西安工业大学光电工程学院,陕西西安710021

出　　处：《传感器世界》2023年第5期31-35,共5页Sensor World

基　　金：国家自然科学基金资助项目(No.61372016);北京市教育委员会科技计划重点项目(No.KZ201711232030);传感器北京市重点实验室开放课题基金资助项目(No.20220GKF002)。

摘　　要：MEMS陀螺在导航、控制、测量等领域的应用越来越广泛,而激励信号的选取直接影响着陀螺的检测灵敏度。文章首先通过理论分析了陀螺的结构特性,确定了影响信号检测灵敏度因素;然后对陀螺信号处理电路中的激励信号部分进行实验研究;最终选取了适合该陀螺的激励信号。为使无驱动MEMS陀螺具有较高的灵敏度,实验研究了不同幅值、频率和波形种类的激励信号对其产生的影响,为选取合适的激励信号提供了依据。实验结果表明:选择幅值为5 V、频率为139 kHz、占空比为80%左右的方波激励信号为最佳方案,能够有效地提高无驱动MEMS陀螺的输出灵敏度。The increasingly widespread application of MEMS gyroscopes in fields such as navigation,control,and measurement,the selection of excitation signals directly affects the detection sensitivity of gyroscopes.The article first analyzes the structural characteristics of the gyroscope through theoretical analysis,and determines the factors that affect the sensitivity of signal detection;Then,experimental research was conducted on the excitation signal part of the gyroscope signal processing circuit,and the excitation signal suitable for the gyroscope was ultimately selected.In order to improve the sensitivity of the driverless MEMS gyroscope,the effects of excitation signals with different amplitudes,frequencies,and waveform types on its generation were experimentally studied,providing a basis for selecting appropriate excitation signals.The experimental results show that selecting a square wave excitation signal with an amplitude of 5 V,a frequency of 139 kHz,and a duty cycle of about 80%is the optimal solution,which can effectively improve the output sensitivity of the driverless MEMS gyroscope.

关 键 词：无驱动 激励信号 灵敏度 MEMS陀螺 

分 类 号：TP203.3[自动化与计算机技术—检测技术与自动化装置]