极低水汽封装器件的内部水汽含量测试  

Internal Moisture Content Test of Extremely Low Moisture Package Devices

作　　者：迟雷[1,2] 马春利 桂明洋 CHI Lei;MA Chun-li;GUI Ming-yang(The 13th Research Institute,CETC,Shijiazhuang,050051;National semiconductor Device Inspection and testing Center,Shijiazhuang 05005l;Hebei Nuoya Human Resources Developing Group Corporation Jinshi Company,Shijiazhuang 050000)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]国家半导体器件质量检验检测中心,石家庄050051 [3]河北诺亚人力资源发展集团有限公司金石分公司,石家庄050000

出　　处：《环境技术》2023年第6期105-108,共4页Environmental Technology

摘　　要：本文介绍了一种500ppm及以下极低水汽封装器件的内部水汽含量测试技术。该测试在标准化的质谱分析法基础上进行,预先制备了标准含量的水汽混合气体,使用该水汽标准气体进行校准,有效提高了测试精度。比对了不同校准次数取平均值的校准效果,最后测得极低水汽封装产品的水汽含量为(103~317)ppm,结果表明3次校准后取平均值进行结果修正能满足极低水汽封装的指标验证需求。This paper introduces the technology for measuring the internal moisture content of extremely low moisture content(up to 50o ppm)packaged devices.This technology is conducted on the basis of standardized mass spectrometry.A mixture gas with standard contents of moisture and vapor was prepared in advance,which was used for calibration.The test accuracy was improved effectively with this mixture gas.The average values of different calibration times as the final calibration results were compared.Finally,the moisture content of the products of this kind of package were measured to be(103~317)ppm.The results show that taking the average value of three calibration times as the final correction result is suitable for the indicator validation of the extremely low moisture package.

关 键 词：半导体器件 内部气氛 水汽含量 校准技术 

分 类 号：TN306[电子电信—物理电子学]