无封装光纤光栅应变传感器校准系统研究  

Research on the Calibration System of Unpacked Fiber Bragg Grating Strain Sensors

作　　者：郑术力[1] 喻桂华 郑文炜 杨霖[1] 纪春阳[1] ZHENG Shu-li;YU Gui-hua;ZHENG Wen-wei;YANG Lin;JI Chun-yang(China Electronic Product Reliability and Environmental Testing Research Institute,Guangzhou 511370)

机构地区：[1]工业和信息化部电子第五研究所,广州511370

出　　处：《环境技术》2023年第6期157-160,共4页Environmental Technology

基　　金：国家重点研发计划-微纳传感器芯片及封装特性原位测试技术课题,项目编号:2020YFB2008902。

摘　　要：为校准无封装的光纤布拉格光栅(Fiber Bragg Grating, FBG)应变传感器,设计了一套高精度的光纤光栅应变传感器校准系统,系统主要由一套高定位精度的水平位移装置和激光干涉仪组成。对FBGS-S02型的无封装FBG应变传感器进行校准测试,校准结果的最大误差为-0.2με,满足该传感器±2με的误差要求。A high-precision calibration system for Fiber Bragg Grating Strain sensors without packaging has been designed.The system mainly consists of a high-precision horizontal displacement device and a laser interferometer.Calibrate the FBGS-S02 type unpackaged Fiber Bragg Grating Strain sensor,the maximum error of the calibration results is-0.2μe,meet±2μe of the sensor error requirements for.

关 键 词：光纤光栅 应变传感器 校准系统 位移装置 

分 类 号：TB921[一般工业技术—计量学]