一种L波段多层低群延时滤波器设计  

Design of an L-Band Multilayer Low Group Delay Filter

作　　者：潘长凯 吴倩楠[2,3,4] 李孟委 PAN Changkai;WU Qiannann;LI Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,P.R.China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,P.R.China;Center for Microsystem Integration,North University of China,Taiyuan 030051,P.R.China;School of Science,North Universityof China,Taiyuan 030051,P.R.China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051 [3]中北大学微系统集成研究中心,太原030051 [4]中北大学理学院,太原030051

出　　处：《微电子学》2023年第2期350-354,共5页Microelectronics

基　　金：型谱项目(2006WW0011)。

摘　　要：针对目前L波段滤波器体积大、群延时高、损耗大等问题,提出了一种L波段多层低群延时滤波器。通过选取高硅基作为衬底材料,采用多层交指结构的谐振器来降低带内群延时,减小体积。利用HFSS软件对滤波器展开建模与仿真。通过调整谐振器的参数,得到最佳设计方案。仿真结果表明,该滤波器的中心频率为1.5 GHz,带内插入损耗小于1.2 dB,带内群延时波动小于500 ps,在中心频率左右0.3 GHz处的带外抑制达到50 dB,滤波器尺寸较小,为8 mm×7 mm×1.5 mm。An L-band multilayer low group delay filter is proposed to solve the problems of large volume,high group delay and large loss of current L-band filters.By selecting high silicon base as substrate material,a multilayer interfingering structure resonator was adopted to reduce in-band group delay and volume.HFSS software was used to implement modeling and simulating of the proposed filter.By adjusting the parameters of the resonator,the optimal design scheme was obtained.Simulation results show that the center frequency of the filter is l.5 GHz,the in-band insertion loss is less than 1.2 dB,the in-band group delay fluctuation is less than 500 ps,and the out-ofband suppression at the center frequency around 0.3 GHz reaches 50 dB with a small size of 8 mm×7 mm×1.5 mm.

关 键 词：滤波器 低群延时 MEMS 多层交指结构 中心频率 

分 类 号：TN385[电子电信—物理电子学] TN713