厚类金刚石膜研究进展  

Research Progress of Thick Diamond-like Carbon Coating

作　　者：武帅政 张树玲 黄腾龙[1] 郭栋 马兴华 丁文捷 WU Shuaizheng;ZHANG Shuling;HUANG Tenglong;GUO Dong;MA Xinghua;DING Wenjie(School of Mechanical and Automotive Engineering,Qingdao University of Technology,Qingdao 266520,China;School of Mechanical Engineering,Ningxia University,Yinchuan 750001,China)

机构地区：[1]青岛理工大学机械与汽车工程学院,山东青岛266520 [2]宁夏大学机械工程学院,宁夏银川750001

出　　处：《热加工工艺》2023年第10期14-19,共6页Hot Working Technology

基　　金：国家自然科学基金项目(51861031)。

摘　　要：类金刚石膜是一种由sp3和sp2混合的亚稳态碳膜。因其良好的力学性能、较低的摩擦系数、优异的抗磨损性能,在石油、航空航天、汽车零部件、医学和光学领域被广泛应用。但因类金刚石膜中存在大的内应力,类金刚石膜的厚度受到限制,而在摩擦磨损过程中很易被损坏,极大限制了类金刚石膜在某些领域的应用。概述了类金刚石膜的组织特点、主要制备方法。同时归纳了厚类金刚石膜的研究现状及降低DLC涂层内应力方面的研究进展,并对目前研究成果中存在的问题进行了总结。Diamond-like carbon,DLC coating is a kind of metastable film mixed with sp 3 and sp 2.Because of its excellent mechanical properties,low friction coefficient,superior wear resistance,DLC coatings are widely used in petroleum,aerospace,automotive parts,medicine and optical fields.Due to the large interior stress in DLC coatings,the thickness of the DLC coating is limited,which yields the failure in the tribology behavior and greatly limits the application of DLC coatings in some field.The structure characteristic and main preparation methods were summarized.The research progress of decreasing the internal stress of DLC coating were summarized,and the existing problems in the research were summarized.

关 键 词：类金刚石膜 摩擦系数 抗磨损 制备方法 内应力 

分 类 号：TG174[金属学及工艺—金属表面处理]