电容式湿度传感器温-湿-盐雾耦合环境损伤效应与机理研究  

Environmental Damage Effect and Mechanism of Capacitive Humidity Sensor under the Coupling of Temperature-Humidity-Salt Spray

作　　者：李晗 魏小琴[1,2,3] 邓家卫 滕俊鹏 赵阳 赵方超 刘世乡[1,2] 周雪鹏 刘伟 LI Han;WEI Xiao-qin;DENG Jia-wei;TENG Jun-peng;ZHAO Yang;ZHAO Fang-chao;LIU Shi-xiang;ZHOU Xue-peng;LIU Wei(Southwest Institute of Technology and Engineering,Chongqing 400039,China;CSGC Key Laboratory of Ammunition Storage Environmental Effects,Chongqing 400039,China;Mohe Material Atmospheric Corrosion Station of National Outdoor Scientific Observation and Research,Heilongjiang Mohe 165301,China;Military Representative Office of Army Equipment Department in Chongqing,Chongqing 400042,China)

机构地区：[1]西南技术工程研究所,重庆400039 [2]中国兵器装备集团弹药贮存环境效应重点实验室,重庆400039 [3]漠河大气环境材料腐蚀国家野外科学观测研究站,黑龙江漠河165301 [4]陆军装备部驻重庆地区军事代表室,重庆400042

出　　处：《装备环境工程》2023年第7期161-167,共7页Equipment Environmental Engineering

摘　　要：目的研究电容式湿度传感器在温-湿-盐雾耦合环境作用下的性能退化规律和失效机理。方法将电容式湿度传感器放置在三因素循环(85℃+85%RH→40℃+0.05%NaCl中性盐雾→35℃+50%RH干燥)环境下进行加速老化试验,定期取样,分析响应时间和测量精度退化规律,研究温-湿-盐雾对电容式湿度传感器的环境损伤机制。结果在三因素环境下老化7 d,湿度传感器在标准湿度(>50%RH)环境下感应异常;老化14 d,湿度传感器在每种标准湿度环境下感应异常。测试发现,湿敏电容的电容量偏大,绝缘电阻偏小,损耗角正切偏大,确定湿敏电容失效。湿度传感器在温-湿-盐雾环境下,在盐雾阶段,盐粒子沉积在湿敏材料表面,在干燥阶段水分挥发,最终在湿敏材料表面形成不规整颗粒物,造成湿敏电容绝缘性能降低。在通电测试时,不规整颗粒物在电场作用下易发生尖端发电,使得感湿材料绝缘性能下降,同时伴随有腐蚀和击穿烧蚀,使湿敏电容发生失效。结论湿度传感器在温-湿-盐雾环境下,盐粒子易附着在感湿材料上,在通电环境下发生击穿烧蚀,造成湿度传感器功能失效。The work aims to study the degradation law and failure mechanism of capacitive humidity sensor under the cou-pling environment of temperature-humidity-salt spray.The capacitive humidity sensor was placed in the three-factor(85℃+85%RH→40℃+0.05%NaCl neutral salt spray→35℃+50%RH drying)cycle environment for accelerated aging test and sampled regularly to analyze the degradation law of response time and measurement accuracy and study the environmental damage mechanism of temperature-humidity-salt spray on capacitive humidity sensor.After aging for 7 days in the three-factor environment,the humidity sensor in the standard humidity(>50%RH)environment had abnormal induction.After aging for 14 days,the humidity sensor in every standard humidity environment had abnormal induction.When the humidity sensitive capacitor was tested,it was found that the capacitance was rather large,the insulation resistance was rather small,and the loss angle tangent was rather large,which determined the failure of the humidity sensitive capacitor.In temperature-humidity-salt spray environment,particles deposited on the surface of humidity sensitive material in salt spray phase.In drying stage,moisture volatilized and irregular particles formed on the surface of humidity sensitive material,which reduced the insulation performance of humidity sensitive capacitor.In the current test,irregular particles were prone to generating power at the tip under the action of electric field,which degraded the insulation performance of humidity sensitive material,accompanied by corrosion,breakdown and ablation,and eventually the failure of humidity sensitive capacitor.When humidity sensor is in temperature-humidity-salt spray environment,salt particles are easy to adhere to the humidity sensitive material and breakdown and ablation occur in the current environment,resulting in the function failure of humidity sensor.

关 键 词：电容式湿度传感器 温-湿-盐雾 加速老化 环境损伤 损伤机理 

分 类 号：TJ01[兵器科学与技术—兵器发射理论与技术]