MPCVD同质外延单晶金刚石研究进展  

Research Progress of MPCVD Homogeneous Epitaxial Single⁃crystal Diamond

作　　者：董浩永 任瑛[2] 张贵锋[1] DONG Haoyong;REN Ying;ZHANG Guifeng(Key Laboratory of Materials Modification by Laser,Ion and Electron Beams(Ministry of Education),School of Materials Science and Engineering,Dalian University of Technology,Dalian 116024,Liaoning,China;School of Materials Science and Engineering,Henan University of Technology,Zhengzhou 450001,China)

机构地区：[1]大连理工大学材料科学与工程学院三束材料改性教育部重点实验室,辽宁大连116024 [2]河南工业大学材料科学与工程学院,郑州450001

出　　处：《材料导报》2023年第16期52-59,共8页Materials Reports

基　　金：河南省科技厅自然科学项目(222102230040);2021年郑州市重大科技专项(2021KJZX062)。

摘　　要：微波等离子体化学气相沉积法(Microwave plasma chemical vapor deposition,MPCVD)外延单晶金刚石被认为是制备大尺寸、高质量的单晶金刚石极具前景的技术手段之一。本文首先对MPCVD同质外延单晶金刚石生长机理及最新进展做了简要介绍,然后着重阐述了MPCVD法制备大尺寸、高质量单晶金刚石在籽晶筛选与预处理、基台结构设计及生长工艺探索等方面的工作,并对MPCVD高品质单晶金刚石在力学、热学、光学及电子学等领域的应用进行了介绍,对未来单晶金刚石的应用前景进行了展望。The microwave plasma chemical vapor deposition(MPCVD)method is considered one of the most promising techniques for preparing large⁃size and high⁃quality epitaxial single⁃crystal diamonds.In this paper,the growth mechanism and the latest progress of MPCVD homogeneous epitaxial single crystal diamonds are briefly introduced,and then the work of preparing large⁃size and high⁃quality single crystal diamonds by MPCVD method in seed crystal screening and pretreatment,substrate structure design,and growth process exploration is emphatically described.The applications of MPCVD high⁃quality single⁃crystal diamonds in the fields of mechanics,thermal,optics,and electronics are introduced,and the application prospects of single⁃crystal diamonds in the future are forecasted.

关 键 词：MPCVD 同质外延 单晶金刚石 生长工艺 基台结构设计 应用领域 

分 类 号：TB321[一般工业技术—材料科学与工程]