抑制光学系统中杂散光的非对称微结构的设计与加工  

Design and Fabrication of Asymmetric Microstructure for Stray Light Suppression in Optical System

作　　者：邵晶[1,2] 李卓 聂真威 董浩[1,2] 王英明 孙军月[4] 张海涛 赵发财 Shao Jing;Li Zhuo;Nie Zhenwei;Dong Hao;Wang Yingming;Sun Junyue;Zhang Haitao;Zhao Facai(Shandong Collaborative Innovation Center of Laser Green Intelligent Manufacturing Technology and Equipment,Qingdao University of Technology,Qingdao 266520,Shandong,China;Key Lab of Industrial Fluid Energy Conservation and Pollution Control(Qingdao University of Technology),Ministry of Education,Qingdao 266520,Shandong,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,Jilin,China;Beijing Changfeng Kewei PhotoElectronic Technology Co.,Ltd.,Beijing 100195,China;University of Chinese Academy of Sciences,Beijing 100049,China;The 41st Research Institute of CETC,Qingdao 266555,Shandong,China)

机构地区：[1]青岛理工大学山东省激光绿色智能制造与设备协同创新中心,山东青岛266520 [2]工业流体节能与污染控制教育部重点实验室,山东青岛266520 [3]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [4]北京长峰科威光电技术有限公司,北京100195 [5]中国科学院大学,北京100049 [6]中国电子科技集团公司第四十一研究所,山东青岛266555

出　　处：《光学学报》2023年第11期173-180,共8页Acta Optica Sinica

基　　金：中国博士后科学基金资助项目(2018M632639);高等学校学科创新引智计划(111计划)(D21017);山东省重大科技创新工程项目(2019JZZY010402);山东省重点研发计划(2019GGX104106)。

摘　　要：为抑制光学系统内部的杂散光反射,设计了一种具有非对称特征的新型微结构。该微结构通过减少镜面反射的方式,防止外部杂散光到达光学系统像面位置。为实现对非对称微结构的激光高速加工制备,提出了激光振镜加工系统进行倾斜加工的新方式。设计了新型的高速激光加工平台,制备了非对称的铝基微结构,并搭建了镜面反射测试实验和仿真综合实验对样品进行对比测试。结果表明,加工样品对杂散光具有良好的抑制效果。当设定入射角度为15°、照明光束为650 nm激光时,该微结构与常规的阳极氧化表面相比,抑制杂散光的性能提高了10倍,相对反射率仅为0.008%。Objective This paper proposes a novel asymmetric microstructure different from the existing lighttrapping structures.By reducing the specular reflection,the microstructure can improve the stray light suppression performance at a small angle of incidence.The microstructure can be installed in the internal structure of the optical system to effectively reduce the mass and size of the optical system and improve the stray light suppression performance of hoodless optical systems.Methods Comparing the theoretical stray light suppression performance of microstructures with different angles between the front reflective surface and the baseline of the substrate surface,this paper designs asymmetric microstructures whose angle between the front and back reflective surfaces is 90°and angleβbetween the front reflective surface and the baseline of the substrate surface is smaller than 45°.To fabricate the asymmetrical microstructures,this paper also proposes a laser galvanometer processing system for tilting machining.Subsequently,the intensity distribution of the focused laser is obtained by drawing on the research on the action range of the focused light spot under different tilt angles and applying the phase recovery technique(Fig.4).When the tilt angle of the laser is 60°,the intensity distribution of the focused light spot is in a shape similar to that of the microstructure shown in Fig.3.Then,a new highspeed laser processing platform is designed and utilized to process the surface of aluminum alloy samples.The threedimensional morphology of the processed sample surfaces is measured by confocal laser scanning microscopy(CLSM).The formation mechanism of the microstructure surface under different scanning velocities is preliminarily investigated,and the appropriate processing parameters are obtained.Furthermore,the specular reflection test experiment and the integrated simulation experiment are designed to evaluate the performance of the samples.Results and Discussions The investigation of the surface morphology of th

关 键 词：光学设计 微结构制备 纳秒激光 激光材料加工 杂散光抑制 

分 类 号：TN244[电子电信—物理电子学]