介质隔离高精度MEMS谐振式压力传感器  

Dielectrically isolated high-precision MEMS resonant pressure sensors

作　　者：李传昊 王军波 商艳龙 谢波 张玉萍 Li Chuanhao;Wang Junbo;Shang Yanlong;Xie Bo;Zhang Yuping(College of Electronic and Information Engineering,Shandong University of Science and Technology,Shandong 266590,China;Shandong sir-cas technology Co.,Ltd.,Shandong 250102,China;State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,CAS,Beijing 100190,China)

机构地区：[1]山东科技大学电子信息工程学院,山东266590 [2]山东中科思尔科技有限公司,山东250102 [3]中国科学院空天信息创新研究院传感技术国家重点实验室,北京100190

出　　处：《仪器仪表学报》2023年第4期219-227,共9页Chinese Journal of Scientific Instrument

基　　金：国家重点研发计划(2021YFB2012003);国家自然科学基金NSAF联合基金(U1930206,62121003,61825107);中科院关键技术团队(GJJSTD20210004);中科院青年创新促进会会员(2022121);山西省揭榜招标项目(20201101018)资助。

摘　　要：为满足液体、气体多种介质中高精度压力测量要求,本文设计了一种介质隔离的高精度微机械电子系统(MEMS)谐振式压力传感器。为降低充油封装过程中压力传递损耗以及非线性问题,本文对波纹膜片的结构参数进行了仿真优化并确定了适合传感器芯体的膜片参数。采用MEMS加工工艺和真空微量充灌方法,完成了MEMS谐振式压力传感器芯体制作与充油封装。利用双谐振器压力、温度多参数协同敏感方法,在不外加温度传感器的条件下实现了温度自补偿。测试表明,封装后的传感器在-55℃~85℃工作温度范围内,准确度优于±0.01%FS、迟滞性误差优于0.006%FS、非线性误差优于0.003%FS、重复性误差优于0.008%FS。To meet the requirements of high-precision pressure measurement in various applications,such as liquid and gas,a mediumisolated MEMS resonant pressure sensor is designed.To reduce the pressure transfer losses and nonlinearities during oil-filled packaging,the structural parameters of the corrugated diaphragm are simulated and optimized,and the diaphragm parameters suitable for the sensor core are determined.By using MEMS processing technologies and vacuum micro-filling methods,the MEMS resonant pressure sensor chip production and oil-filled packaging are completed.The dual resonator pressure and temperature multi-parameter co-sensing methods are utilized,and the temperature self-compensation is realized without the addition of a temperature sensor.The test shows that the accuracy of the packaged sensor is better than±0.01%FS,hysteresis error is better than 0.006%FS,nonlinearity error is better than 0.003%FS,and repeatability error is better than 0.008%FS in the operating temperature range of-55℃~85℃.

关 键 词：谐振式压力传感器 充油封装 温度自补偿 

分 类 号：TH823.2[机械工程—仪器科学与技术] TP212.1[机械工程—精密仪器及机械]