高性能SOI基纳米硅薄膜微压阻式压力传感器的研究  

Research on SOI⁃Based Nano⁃Silicon Film Micro⁃Piezoresistive Pressure Sensor with High Performance

作　　者：高颖 姜岩峰 GAO Ying;JIANG Yanfeng(Department of Electrical Engineering,School of Internet of Things Engineering,Jiangnan University,Wuxi Jiangsu 214122,China)

机构地区：[1]江南大学物联网工程学院电子工程系,江苏无锡214122

出　　处：《传感技术学报》2023年第6期839-848,共10页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金面上项目(61774078)。

摘　　要：针对高端领域对高性能微小量程压力传感器的迫切需求,设计并实现了一种应用于电子血压计的高性能SOI基纳米硅薄膜微压阻式压力传感器,并提出了相应的检测电路。根据小挠度弯曲理论设计了传感器方形敏感薄膜结构,确定了纳米硅薄膜压敏电阻的阻值大小和尺寸。采用ANSYS有限元分析(FEA)对所设计的传感器结构进行仿真,根据仿真结果确定了压敏电阻在膜片上的最佳放置位置。基于标准MEMS制造技术,在SOI基纳米硅薄膜上设计并实现了该压力传感器。实测结果表明,室温下,在0~40 kPa微压测量范围内所设计的传感器检测灵敏度可达0.45 mV/(kPa·V),非线性度达到0.108%F.S。在-40℃~125℃的工作温度范围内,温度稳定性好,零点温度漂移系数与灵敏度温度漂移系数分别为0.0047%F.S与0.089%F.S。所设计的压力传感器及其检测电路,在现代医疗、工业控制等领域具有较大的应用潜力。In view of the urgent demand for high⁃performance micropressure sensor in advanced application fields,a high⁃performance SOI⁃based nano⁃silicon film micro⁃piezoresistive pressure sensor for blood pressure monitor is designed and implemented,and a corresponding detection circuit is proposed.Based on the small deflection theory,the key structural parameters of sensitive diaphragm are calculated.The geometrical parameters and the resistances of the nano⁃silicon film piezoresistors are determined.The designed structure is simulated by using ANSYS finite element analysis(FEA).Based on the simulation results,the most sensitive positions of the piezoresistors on the diaphragm are obtained.Pressure sensor is designed and implemented on the SOI⁃based nano⁃silicon film based on standard MEMS foundry technology.The measured results demonstrate that the designed sensor shows a high sensitivity of 0.45 mV/(kPa·V)and a nonlinearity of 0.108%F.S in the pressure range of 0-40 kPa at room temperature.In the working temperature range of-40℃~125℃,the zero temperature drift coefficient and sensitivity temperature drift coefficient of the sensor are 0.0047%F.S and 0.089%F.S,respectively,showing good temperature stability.The pressure sensor combined with the detection circuit shows great application potential in modern medical,industrial control and other fields.

关 键 词：SOI基 纳米硅薄膜 微压阻式压力传感器 检测电路 有限元分析(FEA) 

分 类 号：S951.43[农业科学—水产养殖]