MPCVD金刚石薄膜设备冷却水温控系统的设计  

Design of Cooling Water Temperature Control System for MPCVDDiamondFilm Equipment

作　　者：岳云峰 任天平[1] 朱振伟[1,2] YUE Yun-feng;REN Tian-ping;ZHU Zhen-weil(School of Mechanical and Power Engineering,Zhengzhou University,He'nan Zhengzhou 450001,China;College of Mechanical and Electrical Engineering,He'nan Vocational College of Mechanical and Electrical Engineering,He'nan Zhengzhou 450001,China)

机构地区：[1]郑州大学机械与动力工程学院,河南郑州450001 [2]河南机电职业学院机电工程学院,河南郑州450001

出　　处：《机械设计与制造》2023年第8期190-194,共5页Machinery Design & Manufacture

基　　金：CuSnTi钎焊金刚石的界面形成机制及其残余应力研究(20B460005)。

摘　　要：为了解决MPCVD设备运行时冷却水手动调节方式存在的弊端,实现冷却水温的自动调节,设计了一种冷却水温度控制系统。该系统以STM32单片机为控制器的核心,步进电机为执行机构,采用BP神经网络PID控制算法。对系统进行了仿真和试验验证,结果表明:该系统能够实现MPCVD设备生产制备金刚石薄膜过程中冷却水温度的自动控制,与传统的PID控制相比,系统采用BP神经网络PID控制算法时超调量更小,控制精度更高,均方根误差和平均绝对误差更小,具有更好的温度控制效果。ln order to solve the shortcomings of the manual cooling water adjustment method when the MPCVD equipment is running,and realize the automatic adjustment of the cooling water temperature,a cooling water temperature control system is designed.The system uses STM32 single-chip microcomputer as the core of the controller,stepper motor as the actuator,and uses BP neural network PID control algorithm.The system is simulated and verified by experiments.The results show that the system can realize the automatic control of the cooling water temperature during the production of diamond films by the MPCVD equipment.Compared with the traditional PID control,the overshoot is smaller and the control accuracy is higher when the system adopts the BP neural network PID control algorithm.The root mean square error and the average absolute error are smaller,and the temperature control effect is better.

关 键 词：MPCVD设备 冷却水温度 自动控制 STM32控制器 增量式PID BP神经网络 

分 类 号：TH16[机械工程—机械制造及自动化] TP273[自动化与计算机技术—检测技术与自动化装置]