1064 nm负滤光片的设计与制备  

Design and Preparation of 1064 nm Notch Filter

作　　者：刘祺 徐均琪[1] 苏俊宏[1] 刘政 LIU Qi;XU Junqi;SU Junhong;LIU Zheng(Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory,Xi’an Technological University,Xi’an 710021,China;Advanced Optical Manufacturing Technology Joint and Precision Mechanics of CAS,Xi’an 710119,China)

机构地区：[1]西安工业大学陕西省薄膜技术与光学检测重点实验室,西安710021 [2]中国科学院西安精密机械研究所先进光学制造技术联合实验室,西安710119

出　　处：《真空科学与技术学报》2023年第7期625-631,共7页Chinese Journal of Vacuum Science and Technology

基　　金：陕西省国际科技合作与交流计划资助项目(2018KWZ-02);西安市智能探视感知重点实验室项目(201805061ZD12CG45)。

摘　　要：针对当前可见-近红外光电探测器的激光防护要求,研究了1064 nm负滤光片的设计和制备。基于等效折射率理论,综合考虑光谱和场强分布优化,设计了由SiO2/Y_(2)O_(3)/H4组合的规整膜系和SiO2/H4组合的非规整膜系负滤光片;采用离子束辅助热蒸发沉积方式对负滤光片进行了制备,并测试了其光学和抗激光损伤性能。结果表明:在膜系结构G|(0.5LH0.5L)s|A两侧匹配减反膜可以有效减小通带波纹,调整膜系最外层厚度可以同时改善膜系的光谱特性和电场强度分布。镀制的规整膜系负滤光片在400~900 nm和1200~2000 nm波段平均透过率分别为89.98%和93.21%,1064 nm透过率为1.29%,激光损伤阈值为6.0 J/cm^(2);非规整膜系负滤光片在650~900 nm和1200~2000 nm波段平均透过率分别为93.70%和94.99%,1064 nm透过率为1.60%,激光损伤阈值为6.8 J/cm^(2)。According to the current laser protection requirements of human eyes and visible-near-infrared photodetectors,the design method and fabrication technology of a 1064 nm notch filter were studied.Based on the equivalent refractive index theory,considering the optimization of spectrum and field intensity distribution,the notch filter of a quarter film composed of SiO2/Y_(2)O_(3)/H4 and the notch filter of a non-quarter film composed of SiO2/H4 were designed.The notch filter was fabricated by ion beam-assisted thermal evaporation deposition,and its optical and anti-laser damage properties were tested.The results show that matching the antireflection film on both sides of the film structure of G|(0.5LH0.5L)s|A can effectively reduce the passband ripple,and adjusting the thickness of the outermost layer of the film system can improve the spectral characteristics and electric field intensity distribution of the film system at the same time.The average transmittance of the plated notch filter of quarter film at the 400~900 nm and 1200~2000 nm bands is 89.98%and 93.21%respectively,the transmittance at 1064 nm is 1.29%,and the laser damage threshold is 6.0 J/cm^(2);the average transmittance of the notch filter of the non-quarter film is 93.70%and 94.99%at 650~900 nm and 1200~2000 nm bands respectively,the transmittance at 1064 nm is 1.60%,and the laser damage threshold is 6.8 J/cm^(2).

关 键 词：负滤光片 设计 优化 离子束辅助 激光损伤阈值 

分 类 号：O484[理学—固体物理]