轮廓仪法测量大镜面及纳精度表面轮廓仪研发  

Method on the Surface Profiler Testingfor Large Mirrors and Nano-Accuracy Surface Profiler(NSP)

作　　者：李剑白[1] 钱石南 李小芸[1] Mourad Idir LI Jianbai;QIAN Shinan;LI Xiaoyun;Mourad Idir(Jiangxi Academy of Sciences,330096,Nanchang,PRC;Brookhaven National Laboratory,11973,NY,USA)

机构地区：[1]江西省科学院,南昌330096 [2]布鲁克海文国家实验室,11973,NY,USA

出　　处：《江西科学》2023年第4期736-739,共4页Jiangxi Science

基　　金：美国能源部资助;Brookhaven Science Associates LLC授权项目(DE-AC02-98CH10886)。

摘　　要：指出了表面轮廓仪法检测大尺寸光学反射镜的重要意义,论述高精度表面轮廓仪系列分类。新的第3代表面轮廓仪NSP研发解决了较深弯曲反射镜的超高精度测试难题。当ELCOMAT 3000/10自准直仪在50 mm固定距离精密较正后,NSP即可能达到50 nrad rms检测精度。This indicates the importance of surface profiler development and the briefing of a series of surface profiler for testing large mirrors in the paper.The third generation surface profiler,the nano-accuracy surface profiler(NSP)has been developed to solve ultraprecise metrology challenges of strong curved mirrors.When ultraprecise calibration date of the ELCOMAT 3000/10 at 50 mm distance is ready,the NSP will be able to reach 50 nrad rms accuracy.

关 键 词：表面轮廓仪 大尺寸反射镜测试 纳精度 第3代表面轮廓仪 

分 类 号：TH74[机械工程—光学工程]