冷氢化装置氯硅烷除杂设备改进研究  

Cold Hydrogenation Unit Chlorosilane De-hybridization Equipment Improvement Study

作　　者：侯晨辉 李维 李永 云森 HOU Chenhui;LI Wei;LI Yong;YUN Sen(Shaanxi Non-ferrous Tianhong REC Silicon Materials Co.,Ltd.,Yulin 719000)

机构地区：[1]陕西有色天宏瑞科硅材料有限责任公司,榆林719000

出　　处：《现代制造技术与装备》2023年第6期159-161,共3页Modern Manufacturing Technology and Equipment

摘　　要：主要介绍多晶硅生产技术冷氢化工艺中金属氯化物对急冷塔过滤器运行的影响,结合金属氯化物特性和生产实际改造过滤器,通过烘烤过滤器的形式解决滤芯清洗再生的难题,增强系统长周期运行的稳定性。It mainly introduces the influence of metal chloride on the operation of the emergency cooling tower filter in the cold hydrogenation process of polysilicon production technology.Combining the characteristics of metal chloride and production reality,the filter is modified and the problem of cartridge cleaning and regeneration is solved by the form of filter baking,which enhances the stability of the long-cycle operation of the system.

关 键 词：多晶硅 冷氢化 金属氯化物 过滤器 烘烤 

分 类 号：TQ127.2[化学工程—无机化工]