化学气相沉积制备硬质合金刀具涂层研究进展  

Progress in Cemented Carbide Cutting Tools Coating by Chemical Vapor Deposition

作　　者：曾芳芳 邱联昌 吴立颖 谢静 杜勇[1] ZENG Fang-fang;QIU Lian-chang;WU Li-ying;XIE Jing;DU Yong(State Key Laboratory of Powder Metallurgy,Central South University,Changsha 410083,China;Ganzhou Achteck Tool Technology Co.,Ltd.,Jiangxi Ganzhou 341000,China)

机构地区：[1]中南大学粉末冶金国家重点实验室,长沙410083 [2]赣州澳克泰工具技术有限公司,江西赣州341000

出　　处：《表面技术》2023年第8期1-26,70,共27页Surface Technology

基　　金：国家自然科学基金(52031017);江西省科技厅重点研发项目(S2021ZPYFE0275)。

摘　　要：化学气相沉积技术(CVD)广泛应用于硬质耐磨涂层的生产中,该类涂层可大大提高硬质合金工具的耐磨性和寿命。综述了CVD涂层技术在硬质合金切削刀具中的应用研究进展,首先介绍了CVD涂层技术的原理及其发展历程;其次阐述了模拟计算方法(相图计算、流体力学计算、第一性原理计算、相场模拟、机器学习等)在CVD涂层中的应用;再次介绍了CVD涂层的沉积实验及结构和性能表征方法;最后列举了几种典型的硬质合金刀具用CVD涂层,以期为高性能涂层的智能设计、智能集成和智能研发提供新的思路:即把多尺度计算模拟、科学数据库和关键实验集成到硬质涂层开发的全过程中,通过对成分-工艺-结构-性能进行关联分析,将耐磨涂层的研发由传统经验或者半经验方式提升到科学的微结构智能设计上,以实现基体与涂层微结构调控和性能的协同优化,获得最佳的综合性能。The economic demand for higher cutting speeds and environmental demand for reducing the use of harmful coolants and lubricants in modern machining have driven a significant revolution in tool industry.It has been demonstrated that applying a thin layer of hard material to wear-resistant surfaces is a common and effective approach.Chemical vapor deposition(CVD)is an important coating technique which is widely used in production of hard-wear resistant coatings.In this work,the research progress of CVD coating technology in cemented carbide cutting tools was reviewed.Firstly,the principle involving complex thermodynamic and kinetic aspects that affected the coating quality and development history of CVD coating technology for cutting tools were introduced.Secondly,the applications of simulation methods(thermodynamics calculation,computational fluid dynamics,first-principles calculation,phase-field simulation,machine learning,etc.)in CVD coatings were described.Thirdly,the deposition experiment including schematic of CVD coating deposition and precursors as well as reaction of typical CVD hard coatings were introduced.Then the common used characterization methods of structure and properties for CVD coating including atom probe tomography,transmission electron microscope,synchrotron X-ray nanodiffraction,electron backscattered diffraction,differential scanning calorimeter and nano-indentation were described.Finally,several typical CVD coatings(TiC,TiN,TiCN,Al_(2)O_(3),TiAlN,TiSiN,TiSiCN,TiAlSiN,TiB2,TiBN,TiBCN,and diamond coatings)for cemented carbide tools were listed.The current and future research directions of CVD wear-resistant coating can be summarized as follows:(1)Doping C,B,Al,Si and other elements on the basis of CVD TiN coating to improve the oxidation resistance and hardness;(2)Integrating multi-scale computational simulation,scientific database and key experiments into the whole process of hard coating development;(3)Developing ultra-hard nanocomposite coatings consisting of two or more nanocrystals or am

关 键 词：化学气相沉积 硬质合金 智能设计 表征方法 多尺度计算模拟 典型CVD涂层 

分 类 号：TB31[一般工业技术—材料科学与工程]