沉积功率对Ce-Ti/MoS_(2)复合涂层摩擦磨损性能的影响  

Effect of Deposition Power on Friction and Wear Properties of Ce-Ti/MoS_(2) Composite Coatings

作　　者：田昌龄 蔡海潮[1] 薛玉君[1,2,4] 叶军 李继文[3] TIAN Chang-ling;CAI Hai-chao;XUE Yu-jun;YE Jun;LI Ji-wen(School of Mechatronics Engineering,Henan University of Science and Technology,Henan Luoyang 471003,China;Henan Key Laboratory for Machinery Design and Transmission System,Henan University of Science and Technology,Henan Luoyang 471003,China;School of Materials Science and Engineering,Henan University of Science and Technology,Henan Luoyang 471003,China;State Key Laboratory of Aviation Precision Bearing of Luoyang LYC Bearing Corporation,Henan Luoyang 471023,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003 [2]河南科技大学、河南省机械设计及传动系统重点实验室,河南洛阳471003 [3]河南科技大学材料科学与工程学院,河南洛阳471003 [4]洛阳LYC轴承有限公司航空精密轴承国家重点实验室,河南洛阳471023

出　　处：《表面技术》2023年第8期197-207,共11页Surface Technology

基　　金：国家重点研发计划(2021YFB3400401);河南省科技攻关项目(202102210073)。

摘　　要：目的探究Ce-Ti合金靶功率对MoS_(2)基涂层摩擦学性能的影响,制备干摩擦性能优异的MoS_(2)基复合涂层。方法采用直流与射频双靶非平衡共溅射技术,通过调节Ce-Ti(1∶1)靶功率控制涂层掺杂元素含量。利用原子力显微镜(AFM)、X射线光电子能谱仪(XPS)等多种测试手段,分析合金靶功率对Ce-Ti/MoS_(2)涂层微观组织、力学性能及摩擦学性能的影响。结果随着掺杂金属功率提升,MoS_(2)基涂层由明显的晶体结构变为类似非晶结构;表面由纯MoS_(2)的蠕虫状逐渐转化为细小团聚形貌,在达到90 W功率后团聚尺寸又逐渐粗大。当Ce-Ti靶(Ce的原子数分数为2.32%;Ti的原子数分数为7.21%)沉积功率达到70 W时,致密程度显著提高,由无掺杂多孔柱状晶变为细密柱状生长结构,纳米硬度达7.85 GPa,并明显改善了氧化现象。在摩擦磨损方面,70 W功率下磨痕呈微量的磨粒磨损,平均摩擦因数低至0.073,磨损率减少至9.42×10^(-8) mm^(3) N^(-1)m^(-1)。对偶钢球形成转移膜,有效减少摩擦过程剪切力。70 W条件下转移膜面积最小,且摩擦时磨痕处重组生成MoS_(2)结构,显著减少材料的摩擦因数与磨损率。结论磁控溅射Ce-Ti掺杂MoS_(2)基涂层提升了涂层致密程度与摩擦磨损性能,在功率达到70 W时达到最优综合性能,涂层的摩擦因数与磨损率也因形成高质量转移膜而显著降低。MoS_(2)-based self-lubricating coating of many excellent properties has broad application in aerospace and civil fields.MoS_(2) coating is loose and easy to be oxidized at high temperature and humidity.Since rare earth elements have the effect of inhibiting grain growth and coarsening in the material,Ti doping has been widely proven to effectively regulate the coating structure.In order to solve this problem,the effect of Ce-Ti alloy target power on tribological properties of MoS_(2)-based coatings was investigated to prepare MoS_(2)-based self-lubricating coatings with excellent dry friction properties.The effect of the power of the alloy on the microstructure,mechanical properties,and tribological properties of Ce-Ti/MoS_(2) coating was studied by dc and RF dual-target non-equilibrium co-sputtering technology.The doping content of the coating was controlled by adjusting the power of the Ce-Ti(1∶1)target.The composition,crystal phase structure,and microstructure of the coating were analyzed by field emission scanning electron microscopy(FESEM),energy dispersive spectroscopy(EDS),atomic force microscopy(AFM),and grazing incidence X-ray diffraction(GIXRD).The mechanical properties of the coating were tested with nano indentation apparatus.The friction and wear properties of the coating were characterized by a friction and wear testing machine,a white light interferometer,and a Raman spectrometer.The composition changes of the coating surface and wear marks were analyzed.The coating initially grew in(002)preferred orientation,accompanied by(100),(105)and(110)three growth orientation MoS_(2) characteristic peaks.With the increased power of the doped metal,the crystal structure of the MoS_(2) coating became similar to the amorphous structure.The surface changed from pure MoS_(2) vermicular shape to fine aggregate shape gradually,and the aggregate size became coarse after reaching 90 W power.The factor coefficient and wear rate decreased first and then increased.When the deposition power of Ce-Ti target reached 70 W

关 键 词：磁控溅射 二硫化钼涂层 金属掺杂 靶功率 摩擦学性能 

分 类 号：TG147.4[一般工业技术—材料科学与工程]