基于空间映射的S波段MEMS带通滤波器设计  

Design of S-band MEMS Bandpass Filter Based on Space Mapping

作　　者：高旭东 史泽民[1,2,3] 吴倩楠 李孟委[1,2,3] GAO Xudong;SHI Zemin;WU Qiannan;LI Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051;Center for Microsystem Integration,North University of China,Taiyuan 030051;School of Science,North University of China,Taiyuan 030051)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051 [3]中北大学微系统集成研究中心,太原030051 [4]中北大学理学院,太原030051

出　　处：《舰船电子工程》2023年第5期234-238,共5页Ship Electronic Engineering

基　　金：2020年装备发展部型谱项目(2006WW0011)资助。

摘　　要：针对目前RF MEMS带通滤波器存在带内插损大、回波损耗大、不易集成、调试周期长等问题,论文采用空间映射法设计并优化了一款七阶S波段交指带通滤波器。经过4次参数提取和5次精细仿真,该滤波器达到了设计指标要求。仿真结果表明,设计的滤波器中心频率为3.5GHz,带内插损小于1.5dB,3dB带宽为0.95GHz,中心频率左右0.7GHz处的带外抑制大于40dB,带内群时延小于4.5ns,且平坦度大于50%,整体体积为8.5mm×7.4mm×4.2mm。此滤波器能满足通信系统小型化的应用需求,在微波通信领域具有一定的应用价值。To address the current problems of RF MEMS bandpass filter with large in-band insertion loss,large return loss,not easy to integrate,and long debugging period,this paper designs and optimizes a seventh-order S-band interdigital bandpass filter using the space mapping method.After four times of parameter extraction and five times of fine simulation,the filter achieves the design index requirements.The simulation results show that the designed filter has a center frequency of 3.5GHz,an in-band interpolation loss of less than 1.5dB,a 3dB bandwidth of 0.95GHz,an out-of-band rejection of less than 40dB at 0.7GHz around the center frequency,an in-band group time delay of less than 4.5ns,and a flatness of more than 50%,and an overall volume of 8.5mm×7.4mm×4.2mm.This filter can meet the application requirements of miniaturization of communication system and has certain application value in the field of microwave communication.

关 键 词：交指滤波器 MEMS 空间映射 参数提取 

分 类 号：TN389[电子电信—物理电子学]