重复频率对飞秒激光直冲式加工氮化铝陶瓷盲孔的影响  

Effect of Repetition Frequency on Femtosecond Laser Direct Punch Machining of Aluminum Nitride Ceramic Blind Hole

作　　者：王旭 马盼 王宁 刘浩东 赵万芹[3] WANG Xu;MA Pan;WANG Ning;LIU Haodong;ZHAO Wanqin(School of Materials Science and Engineering,Shanghai University of Engineering Science,Shanghai 201620,China;AVIC Shenyang Aircraft Corporation,Shenyang 110086,China;State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049,China)

机构地区：[1]上海工程技术大学材料科学与工程学院,上海201620 [2]沈阳飞机工业(集团)有限公司,辽宁沈阳110086 [3]西安交通大学机械制造系统国家重点实验室,陕西西安710064

出　　处：《轻工机械》2023年第4期21-27,共7页Light Industry Machinery

基　　金：国家自然科学基金(52105465)。

摘　　要：为探究飞秒激光加工参数中激光重复频率对盲孔尺寸和形貌的影响规律,课题组使用飞秒激光直冲方式对氮化铝陶瓷表面进行盲孔加工,通过实验探索激光重复频率对盲孔入口直径、孔深、孔口形貌以及孔侧壁形貌的影响规律。研究结果表明:随着激光重复频率的增大,盲孔的入口直径和孔深均呈现出增大至饱和的趋势且在重复频率为0.3 MHz左右达到饱和;盲孔的孔口形貌和侧壁形貌均随着重复频率的增大而变差,孔口周围的熔溅物堆积现象愈发严重,侧壁重铸层附着愈发严重。重复频率过高或者过低都会使得直冲式加工的盲孔达不到理想的尺寸和形貌。In order to investigate the influence of laser repetition frequency on the size and shape of blind holes among the parameters of femtosecond laser processing,the femtosecond laser direct punching method was used to process the blind holes on the surface of aluminum nitride ceramics to experimentally explore the influence of laser repetition frequency on the diameter,depth,shape and side wall shape of blind holes.The results show that with the increase of laser repetition frequency,the entrance diameter and hole depth of the blind hole tend to increase to saturation and reach saturation at the repetition frequency of 0.3 MHz;with the increase of the repetition frequency,the morphology of the orifice and side wall of the blind hole deteriorate,the accumulation of molten spatter around the hole becomes more serious,and the adhesion of the side wall recast layer becomes more severely.Too high or too low repetition frequency will make the blind hole machined by direct punching to fail to achieve the desired size and morphology.

关 键 词：飞秒激光 氮化铝陶瓷 盲孔 直冲式加工 

分 类 号：TN249[电子电信—物理电子学] TH161[机械工程—机械制造及自动化]